JPS6188236U - - Google Patents

Info

Publication number
JPS6188236U
JPS6188236U JP17244584U JP17244584U JPS6188236U JP S6188236 U JPS6188236 U JP S6188236U JP 17244584 U JP17244584 U JP 17244584U JP 17244584 U JP17244584 U JP 17244584U JP S6188236 U JPS6188236 U JP S6188236U
Authority
JP
Japan
Prior art keywords
jig
counter electrode
vacuum container
bias voltage
evacuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17244584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17244584U priority Critical patent/JPS6188236U/ja
Publication of JPS6188236U publication Critical patent/JPS6188236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP17244584U 1984-11-15 1984-11-15 Pending JPS6188236U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17244584U JPS6188236U (US06815460-20041109-C00097.png) 1984-11-15 1984-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17244584U JPS6188236U (US06815460-20041109-C00097.png) 1984-11-15 1984-11-15

Publications (1)

Publication Number Publication Date
JPS6188236U true JPS6188236U (US06815460-20041109-C00097.png) 1986-06-09

Family

ID=30730111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17244584U Pending JPS6188236U (US06815460-20041109-C00097.png) 1984-11-15 1984-11-15

Country Status (1)

Country Link
JP (1) JPS6188236U (US06815460-20041109-C00097.png)

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