JPS6187870A - コ−テイング膜の形成方法 - Google Patents

コ−テイング膜の形成方法

Info

Publication number
JPS6187870A
JPS6187870A JP20802584A JP20802584A JPS6187870A JP S6187870 A JPS6187870 A JP S6187870A JP 20802584 A JP20802584 A JP 20802584A JP 20802584 A JP20802584 A JP 20802584A JP S6187870 A JPS6187870 A JP S6187870A
Authority
JP
Japan
Prior art keywords
film
oxide
plasma
forming
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20802584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536505B2 (OSRAM
Inventor
Iwao Watanabe
巌 渡辺
Hideo Yoshihara
秀雄 吉原
Shojiro Miyake
正二郎 三宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20802584A priority Critical patent/JPS6187870A/ja
Publication of JPS6187870A publication Critical patent/JPS6187870A/ja
Publication of JPH0536505B2 publication Critical patent/JPH0536505B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP20802584A 1984-10-05 1984-10-05 コ−テイング膜の形成方法 Granted JPS6187870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20802584A JPS6187870A (ja) 1984-10-05 1984-10-05 コ−テイング膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20802584A JPS6187870A (ja) 1984-10-05 1984-10-05 コ−テイング膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6187870A true JPS6187870A (ja) 1986-05-06
JPH0536505B2 JPH0536505B2 (OSRAM) 1993-05-31

Family

ID=16549423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20802584A Granted JPS6187870A (ja) 1984-10-05 1984-10-05 コ−テイング膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6187870A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728582A (en) * 1985-08-13 1988-03-01 Feldmuehle Aktiengesellschaft Ceramic sliding element with aluminum oxide and silicon nitride members
US6365012B1 (en) * 1990-07-24 2002-04-02 Nippon Sheet Glass Co., Ltd. Magnetic recording medium and a method of manufacturing the same
US11702741B2 (en) * 2021-12-13 2023-07-18 Saudi Arabian Oil Company Producing polycrystalline diamond compact cutters with coatings

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641372A (en) * 1979-09-10 1981-04-18 Mitsubishi Metal Corp Surface covered ultra hard alloy member for cutting tool
JPS58126972A (ja) * 1982-01-22 1983-07-28 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金工具
JPS60114572U (ja) * 1984-01-10 1985-08-02 富士電機株式会社 空気冷却器付外扇形回転電機

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641372A (en) * 1979-09-10 1981-04-18 Mitsubishi Metal Corp Surface covered ultra hard alloy member for cutting tool
JPS58126972A (ja) * 1982-01-22 1983-07-28 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金工具
JPS60114572U (ja) * 1984-01-10 1985-08-02 富士電機株式会社 空気冷却器付外扇形回転電機

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728582A (en) * 1985-08-13 1988-03-01 Feldmuehle Aktiengesellschaft Ceramic sliding element with aluminum oxide and silicon nitride members
US6365012B1 (en) * 1990-07-24 2002-04-02 Nippon Sheet Glass Co., Ltd. Magnetic recording medium and a method of manufacturing the same
US11702741B2 (en) * 2021-12-13 2023-07-18 Saudi Arabian Oil Company Producing polycrystalline diamond compact cutters with coatings

Also Published As

Publication number Publication date
JPH0536505B2 (OSRAM) 1993-05-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term