JPS6186087A - レ−ザ加工装置 - Google Patents

レ−ザ加工装置

Info

Publication number
JPS6186087A
JPS6186087A JP59207956A JP20795684A JPS6186087A JP S6186087 A JPS6186087 A JP S6186087A JP 59207956 A JP59207956 A JP 59207956A JP 20795684 A JP20795684 A JP 20795684A JP S6186087 A JPS6186087 A JP S6186087A
Authority
JP
Japan
Prior art keywords
lens
distance
workpiece
light
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59207956A
Other languages
English (en)
Japanese (ja)
Other versions
JPH037476B2 (enrdf_load_stackoverflow
Inventor
Kozaburo Shibayama
耕三郎 柴山
Takashi Ikeda
隆 池田
Hidehiko Nakao
英彦 中尾
Kazuo Takashima
和夫 高嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59207956A priority Critical patent/JPS6186087A/ja
Publication of JPS6186087A publication Critical patent/JPS6186087A/ja
Publication of JPH037476B2 publication Critical patent/JPH037476B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Optical Distance (AREA)
  • Laser Beam Processing (AREA)
JP59207956A 1984-10-05 1984-10-05 レ−ザ加工装置 Granted JPS6186087A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59207956A JPS6186087A (ja) 1984-10-05 1984-10-05 レ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59207956A JPS6186087A (ja) 1984-10-05 1984-10-05 レ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS6186087A true JPS6186087A (ja) 1986-05-01
JPH037476B2 JPH037476B2 (enrdf_load_stackoverflow) 1991-02-01

Family

ID=16548315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59207956A Granted JPS6186087A (ja) 1984-10-05 1984-10-05 レ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS6186087A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259011A (ja) * 1986-05-02 1987-11-11 Toshiba Corp 距離検出器
US8710403B2 (en) * 2008-02-19 2014-04-29 M-Solv Ltd. Laser processing a multi-device panel
WO2024241638A1 (ja) * 2023-05-19 2024-11-28 株式会社荏原製作所 ビーム加工装置の観察装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525125A (en) * 1978-08-11 1980-02-22 Toshiba Corp Positioning unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525125A (en) * 1978-08-11 1980-02-22 Toshiba Corp Positioning unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259011A (ja) * 1986-05-02 1987-11-11 Toshiba Corp 距離検出器
US8710403B2 (en) * 2008-02-19 2014-04-29 M-Solv Ltd. Laser processing a multi-device panel
WO2024241638A1 (ja) * 2023-05-19 2024-11-28 株式会社荏原製作所 ビーム加工装置の観察装置

Also Published As

Publication number Publication date
JPH037476B2 (enrdf_load_stackoverflow) 1991-02-01

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