JPS6185881A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS6185881A JPS6185881A JP20699284A JP20699284A JPS6185881A JP S6185881 A JPS6185881 A JP S6185881A JP 20699284 A JP20699284 A JP 20699284A JP 20699284 A JP20699284 A JP 20699284A JP S6185881 A JPS6185881 A JP S6185881A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- laser
- tube
- medium gas
- laser medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はレーザ発振器に関するものである、〔従来の技
術〕
従来のレーザ発振器は第６図に示−れている。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a laser oscillator. [Prior Art] A conventional laser oscillator is shown in FIG.
同図において、レーザ媒質ガス（１）は送入口（２）よ
り放電管（３）内に送入ブれたのち、排気口（４）より
排気されるようになっている。放電管（３）内には一対
の放電電極（５Ａ）、（５Ｂ）が一定間隔をあけて設け
られ、電源（６）より放電電極（５Ａ）と（５Ｂ）とに
高電圧を加えると、グミ−放電（７）が発生するように
なる。このグロー放電（７）によりレーザ媒質ガス（１
）が励起され、放電管（３）の端部に取付けられた全反
射鏡と部分透過鏡（９）との間でレーザ発振が生じ、部
分透過鏡（９）よシレーザ党（ト）が出力これるように
なる。レーザ発振のモード形状は断面が円形で、中心は
強度が高く、ガウス分布をしている。In the figure, a laser medium gas (1) is introduced into a discharge tube (3) through an inlet (2) and then exhausted through an exhaust port (4). Inside the discharge tube (3), a pair of discharge electrodes (5A) and (5B) are provided at regular intervals, and when a high voltage is applied to the discharge electrodes (5A) and (5B) from the power source (6), Gummy discharge (7) begins to occur. This glow discharge (7) causes the laser medium gas (1
) is excited, laser oscillation occurs between the total reflection mirror attached to the end of the discharge tube (3) and the partial transmission mirror (9), and the laser beam (g) is output from the partial transmission mirror (9). You will be able to do this. The mode shape of laser oscillation has a circular cross section, high intensity at the center, and a Gaussian distribution.
第７図は放電管（３）の断面を示しており、レーザ発振
のモード形状Ｃ１１）は放電管（３）の内径より小シ〈
設定され、モード形状Ｑｌ）と放電管（３）との間の部
分はレーザ発振に寄与しなくなっている。また、グロー
放電（７）け放電管（３）内金体に拡がるため、レーザ
発振に寄与せず排気口（４）から流れ去ってしまうレー
ザ媒質ガス（１）が多くあった。Figure 7 shows a cross section of the discharge tube (3), and the mode shape of laser oscillation C11) is smaller than the inner diameter of the discharge tube (3).
The portion between the mode shape Ql) and the discharge tube (3) no longer contributes to laser oscillation. Further, since the glow discharge (7) spreads to the inner metal body of the discharge tube (3), there was a large amount of the laser medium gas (1) that did not contribute to laser oscillation and flowed away from the exhaust port (4).
従来のレーザ発振器は前記のようにモード形状（Ｉｎと
放電管（３）との間の部分がレーザ発振にを与せず、し
かもグロー放Ｍ、（７）の一部がレーザ発振に寄与せず
に排気口（４）から流れ去るので発振効率が低下する問
題点を有していた、
本発明は従来のもののもつ問題点を解決して、発振効率
の向上するレーザ発振器を提供することを目的とするも
のである。In conventional laser oscillators, as mentioned above, the mode shape (the part between In and the discharge tube (3) does not contribute to laser oscillation, and moreover, a part of the glow emission M, (7) does not contribute to laser oscillation. The present invention aims to solve the problems of conventional laser oscillators and provide a laser oscillator with improved oscillation efficiency. This is the purpose.
本発明はｉｉ前記のようなレーザ発振器において、放電
管の横断面の中心への方向よりずれた方向よリレーザ媒
質ガスを挿入情せる送入口を放電管に設けると共に、放
電管内でレーザ媒質ガスを回転する方向に整流板を放電
管内に取付けたものである。The present invention provides (ii) a laser oscillator as described above, in which the discharge tube is provided with an inlet for introducing the laser medium gas in a direction deviated from the direction toward the center of the cross section of the discharge tube, and the laser medium gas is introduced in the discharge tube. A rectifying plate is installed inside the discharge tube in the direction of rotation.
〔作 用〕
本発明においては、レーザ媒質ガスが送入口より放電管
内に回転して流入し、しがも放′屯管内でｐｍ板によっ
て回転するようになる。[Function] In the present invention, the laser medium gas rotates and flows into the discharge tube from the inlet, and is rotated by the PM plate within the discharge tube.
以下、本発明の実施例全図面に基づいて説明する。第１
図は放電管（３）の横断面の中心への方向よりずれた方
向よりレーザ媒質ガス（１）を送入させる送入口（２）
を放電管（３１に設けた状態を示している。Hereinafter, embodiments of the present invention will be described based on all the drawings. 1st
The figure shows an inlet (2) through which the laser medium gas (1) is introduced from a direction deviated from the center of the cross section of the discharge tube (3).
The figure shows the state in which the discharge tube (31) is provided.
したがって、レーザ媒質ガス（１）は送入口（２）より
放電管（３）内に回転しながら流入するようになる。第
２図及び第３図は放電管（３）内に整流板０４にレーザ
媒質ガス（１１が放電管（３）内で回転する方向に取付
けた状態を示している０したがって、レーザ媒質ガス（
１）は放電管（３）内でラセン状に回転するようになる
。レーザ媒質ガス（１）のラセン状の回転により、第４
図に示すようにレーザ媒質ガス（１）は放電管（３）の
内９ＡＫ近い部分（２）より放電管（３）の中心の方向
に流れ込むようになる。レーザ媒質ガス（１）がレーザ
発振のモード形状■内に流れ込むと、レーザ媒質ガス（
１）けレーザ発振に寄与するようになる。また、レーザ
媒質ガス（１）が回転すると、混合作用があるため、励
起空間の励起強度が均一にな９、艮いレーザ発振モード
、特にシングルモード発振が安定するようになる。Therefore, the laser medium gas (1) flows into the discharge tube (3) from the inlet (2) while rotating. Figures 2 and 3 show a state where the laser medium gas (11) is attached to the rectifying plate 04 in the discharge tube (3) in the direction of rotation within the discharge tube (3).
1) comes to rotate in a spiral shape within the discharge tube (3). Due to the spiral rotation of the laser medium gas (1), the fourth
As shown in the figure, the laser medium gas (1) flows toward the center of the discharge tube (3) from a portion (2) near 9AK of the discharge tube (3). When the laser medium gas (1) flows into the laser oscillation mode shape ■, the laser medium gas (
1) It begins to contribute to laser oscillation. Further, when the laser medium gas (1) rotates, there is a mixing effect, so that the excitation intensity in the excitation space becomes uniform9, and various laser oscillation modes, especially single mode oscillation, become stable.
なお、整流板Ｑ４の材質はセラミック、ガラス等の絶縁
物が使用はれている。図中その他の符号で１６図及び第
７図と同符号のものは第６図及び第７図の符号のものと
同−又は相当部分を示しているので、説明を省略する。Note that the material of the rectifying plate Q4 is an insulating material such as ceramic or glass. Other reference numerals in the drawings that are the same as those in FIGS. 16 and 7 indicate the same or corresponding parts as those in FIGS. 6 and 7, and their explanations will be omitted.
ａ記実施例の代わりに第５図に示す他の実施例（ＩＩ）
ｊ ウｌｃ＆ｆｌｆ、！（３）（ｉり外（ＩＱＫ電極
（５Ｃ）、（５Ｄ） ？設け、交流電源（６）Ｋより高
電圧を印卵し、無声放電Ｏｎを発生ばせる無声放電励起
ガスレーザ装置であっても前記実施例と同様の効果を得
ることができる。Another embodiment (II) shown in FIG. 5 instead of the embodiment a.
j ulc&flf,! (3) (IQK electrodes (5C), (5D) ?) are provided, and even if it is a silent discharge excited gas laser device that applies a higher voltage than the AC power supply (6) K and generates a silent discharge. It is possible to obtain the same effects as in the above embodiment.
本発明は前記のようにレーザ媒質ガスが送入口より故ｔ
１！管内に回転して流入し、し刀）も放電管内で整流板
によって回転するようになるので、発振効率が向上して
、安定した良いモードが得られる効果を有している。In the present invention, as described above, the laser medium gas is
1! Since the discharge tube rotates and flows into the discharge tube, the current flow plate is also rotated within the discharge tube by the rectifying plate, which improves oscillation efficiency and has the effect of obtaining a stable and good mode.
第１図〜第４図は本発明の実施例を示しており、第１図
は送入口を放電管に設けた状態を示す説明図１第２図は
レーザ発振器のＩａ、決を示す説明図、第３図はレーザ
発振器の断面を示す説ｉｊｄ図、第４図はレーザ媒質ガ
スが放電管の内側に近い部分より放電管の中心方向に流
れ込む状態１示す説明図でおる。第５図は他の実施例を
示す説明図である。
第６図は従来のレーザ発振器を示す説明図、第７図は従
来のレーザ発振器の断面を示す説明図である。
１・・・レーザ媒質ガス、２・・・送入口、６・・・放
電管、５Ａ 、５Ｂ・・・放電電極、７・・・グロー放
電、１ｏ・・・レーザ光、１１・・・レーザ発振のモー
ド形状、１４・・・整流板。
なお、図中、同一符号は同−又は相当部分を示す。1 to 4 show embodiments of the present invention. FIG. 1 is an explanatory diagram showing a state in which an inlet is provided in a discharge tube. FIG. 2 is an explanatory diagram showing a state in which a laser oscillator is installed. 3 is an explanatory diagram showing a cross section of the laser oscillator, and FIG. 4 is an explanatory diagram showing a state 1 in which the laser medium gas flows toward the center of the discharge tube from a portion near the inside of the discharge tube. FIG. 5 is an explanatory diagram showing another embodiment. FIG. 6 is an explanatory diagram showing a conventional laser oscillator, and FIG. 7 is an explanatory diagram showing a cross section of the conventional laser oscillator. DESCRIPTION OF SYMBOLS 1...Laser medium gas, 2...Inlet, 6...Discharge tube, 5A, 5B...Discharge electrode, 7...Glow discharge, 1o...Laser light, 11...Laser Mode shape of oscillation, 14... Rectifier plate. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
一対の対電電極間に高電圧を加え、グロー放電を起こさ
せることにより放電管内を流れるレーザ媒質ガスを励起
し、レーザ光を出力せしめるレーザ発振器において、 前記放電管の横断面の中心への方向よりずれた方向より
レーザ媒質ガスを送入させる送入口を前記放電管に設け
ると共に前記放電管内でレーザ媒質ガスが回転する方向
に整流板を前記放電管内に取付けたことを特徴とするレ
ーザ発振器。[Claims] A pair of discharge electrodes are provided at a certain interval in the discharge tube, and a high voltage is applied between the pair of counter electrodes to cause glow discharge, thereby exciting the laser medium gas flowing in the discharge tube. In the laser oscillator that outputs laser light, the discharge tube is provided with an inlet for introducing the laser medium gas from a direction deviated from the center of the cross section of the discharge tube, and the laser medium gas is supplied within the discharge tube. 1. A laser oscillator, characterized in that a rectifier plate is installed inside the discharge tube in the direction in which the discharge tube rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20699284A JPS6185881A (en) | 1984-10-04 | 1984-10-04 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20699284A JPS6185881A (en) | 1984-10-04 | 1984-10-04 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185881A true JPS6185881A (en) | 1986-05-01 |
Family
ID=16532387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20699284A Pending JPS6185881A (en) | 1984-10-04 | 1984-10-04 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185881A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823355A (en) * | 1987-03-10 | 1989-04-18 | Amada Engineering & Service Co., Inc. | High speed axial flow gas laser generator |
| US4993037A (en) * | 1987-03-10 | 1991-02-12 | Amada Engineering & Service Co., Inc. | High speed axial flow gas laser generator |
| JPH0458578A (en) * | 1990-06-28 | 1992-02-25 | Kawasaki Steel Corp | Method and device for lasing in gas laser using autogenous revolving gas flow |
-
1984
- 1984-10-04 JP JP20699284A patent/JPS6185881A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823355A (en) * | 1987-03-10 | 1989-04-18 | Amada Engineering & Service Co., Inc. | High speed axial flow gas laser generator |
| US4993037A (en) * | 1987-03-10 | 1991-02-12 | Amada Engineering & Service Co., Inc. | High speed axial flow gas laser generator |
| JPH0458578A (en) * | 1990-06-28 | 1992-02-25 | Kawasaki Steel Corp | Method and device for lasing in gas laser using autogenous revolving gas flow |
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