JPS62200780A - High-speed axial-flow-type gas laser device - Google Patents
High-speed axial-flow-type gas laser deviceInfo
- Publication number
- JPS62200780A JPS62200780A JP4158586A JP4158586A JPS62200780A JP S62200780 A JPS62200780 A JP S62200780A JP 4158586 A JP4158586 A JP 4158586A JP 4158586 A JP4158586 A JP 4158586A JP S62200780 A JPS62200780 A JP S62200780A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- discharge tube
- laser
- gas
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 230000007423 decrease Effects 0.000 abstract description 4
- 238000007599 discharging Methods 0.000 abstract description 3
- 230000005284 excitation Effects 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 28
- 230000000694 effects Effects 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 101710162453 Replication factor A Proteins 0.000 description 1
- 102100035729 Replication protein A 70 kDa DNA-binding subunit Human genes 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はレーザ出力及びビームモードの短時間変動の
安定化に関するものである−６〔従来の技術〕
第３図は例えば特開昭５５−３０８１７号公報に示され
た従来の高速軸流型レーザ装置であり、図において放電
管本体（１）は通常内径１０数閣の細管よりなる放電管
（２）、陽ｔｌｉ （３１およびこれに対応して配設さ
れた陰極（４）から構成されている。放電管（２）の一
端は曲管（５）及び絶縁管（６）を通じてブロア（７）
に連通し、他端は曲管（８）及び熱交換器（９）に連通
し、全体としてガス流路を形成する。曲管（５１，（８
１の一部にはそれぞれ反射鏡（１０） 、 （１１）が
配設されており、反射鏡（１１）は後述するレーザ光の
一部を外部へ透過する。放電管本体（１）内に充填され
たＣＯ□。Detailed Description of the Invention [Field of Industrial Application] This invention relates to stabilization of short-time fluctuations in laser output and beam mode-6 [Prior Art] This is a conventional high-speed axial flow laser device disclosed in Publication No. 30817, and in the figure, the discharge tube main body (1) is usually composed of a thin tube with an inner diameter of about 10 mm (2), a positive discharge tube (31), and a corresponding one. One end of the discharge tube (2) is connected to a blower (7) through a bent tube (5) and an insulating tube (6).
The other end communicates with the bent pipe (8) and the heat exchanger (9), forming a gas flow path as a whole. Bent pipe (51, (8
Reflecting mirrors (10) and (11) are disposed in a portion of the laser beam 1, respectively, and the reflecting mirror (11) transmits a portion of laser light, which will be described later, to the outside. CO□ filled in the discharge tube body (1).
Ｎ、、Ｈｅ等のガス媒体（１２）をブロア（７）により
矢印（１３）方向に循環して、冷却、再使用する。（１
４）は直流電源で、陽極（３）および安定抵抗（１５）
を通じて陰極（４）に接続されている。A gas medium (12) such as N, He, etc. is circulated in the direction of the arrow (13) by a blower (7) to be cooled and reused. (1
4) is a DC power supply with an anode (3) and a stabilizing resistor (15)
It is connected to the cathode (4) through.
とのレーザ装置の作用について説明すると、直流電圧の
印加によって陽極（３）、陰極（４）間（すなわちガス
流方向）に生ずるグロー放電のエネルギーにより、ＣＯ
２ガスは反転分布状態となリレーザ光を発生する。乙の
レーザ光は反射１１ｊ （１０１、（１１１間で往復反
射し、その一部は一方の反射鏡を透過して外部にとり出
され、たとえば鉄板を穿孔する。To explain the operation of the laser device, CO
The two gases generate laser light in a population inversion state. The laser beam B is reflected back and forth between the reflections 11j (101 and 111), and a part of it is transmitted through one of the reflecting mirrors and taken out to the outside, for example, to perforate an iron plate.
グロー放電によりガス媒体（１２）の温度が上昇し、反
転分布状態が失われるのを防ぐためにブロア（７）を駆
動して、ガス媒体（１２）を矢印方向（１３）に循環さ
せて、熱交換器（９）により冷却している。In order to prevent the temperature of the gas medium (12) from rising due to glow discharge and the population inversion state being lost, the blower (7) is driven to circulate the gas medium (12) in the direction of the arrow (13), thereby increasing the temperature of the gas medium (12). It is cooled by an exchanger (9).
ところで、一般の高速軸流型では第３図に示す如くガス
流方向に放電を行うため、放電安定の指針であるＰｄ
（Ｐ： ガス圧力ｊＴｏｒｒｌ、 ｄ ：ギャップ長１
ｃｍ１）ば１０００Ｔｏｒｒ−Ｃｍ以上という大きな領
域（放電不安定領域）で使用せねばならず、放電は管中
央部に集中しやすい。そこで放電管のガス入口部に乱流
発生装置を押入し、ガスを乱流化して放電を均質化する
必要がある。By the way, in a general high-speed axial flow type, discharge is performed in the gas flow direction as shown in Figure 3, so Pd, which is a guideline for discharge stability,
(P: gas pressure jTorrl, d: gap length 1
cm1) must be used in a large area (discharge unstable area) of 1000 Torr-Cm or more, and discharge tends to concentrate in the center of the tube. Therefore, it is necessary to insert a turbulence generator into the gas inlet of the discharge tube to make the gas turbulent and homogenize the discharge.
〔発明が解決しようとする問題点〕
従来の高速軸流型装置は以上のように構成されているの
で、ガス流の乱れがレーザ出力及びビームモードが数Ｈ
ｚ〜数百Ｈｚの周波数程度の短時間変動を引き起こし、
加工精度（特に面積度）が著しく低下するなどの問題が
あった。[Problems to be solved by the invention] Since the conventional high-speed axial flow type device is configured as described above, the turbulence of the gas flow causes the laser output and beam mode to increase by several H.
It causes short-term fluctuations in the frequency range of z~several hundred Hz,
There were problems such as a significant decrease in processing accuracy (particularly area accuracy).
この発明は上記のような問題点を解消するためになされ
たものでレーザ出力及びビームモードの短時間変動を抑
え、加工精度の高いレーザ装置を１与ることを目的とす
る。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a laser device that suppresses short-term fluctuations in laser output and beam mode and has high processing accuracy.
この発明に係るガスレーザ装置は放電方向をガス流に対
して横方向とする手段を設けると共に、放電管出口の管
路断面を徐々に拡げたいわゆる“ディフューザ″を設け
たものである。The gas laser device according to the present invention is provided with means for making the discharge direction transverse to the gas flow, and is also provided with a so-called "diffuser" in which the cross section of the pipe at the outlet of the discharge tube is gradually widened.
この発明におけるガスレーザ装置では、放電ギャップ長
ｄが小さくできるため放電は安定し、ガスを乱流化して
放電を安定化させる必要がなくなる。そこで、従来とは
逆の思想で放電部出口に“ディフューザ°を設けてガス
流を安定化させたことにより、レーザ出力及びビームモ
ードの短時間変動が激減される。In the gas laser device of the present invention, the discharge gap length d can be made small, so the discharge is stable, and there is no need to stabilize the discharge by making the gas turbulent. Therefore, by providing a diffuser at the outlet of the discharge section to stabilize the gas flow, contrary to the conventional idea, short-term fluctuations in laser output and beam mode are drastically reduced.
以下この発明の一実施例を無声放電励起Ｃ０２レーザの
場合を例にとって図に従って説明する。An embodiment of the present invention will be described below with reference to the drawings, taking the case of a silent discharge pumped C02 laser as an example.
第１図において、（ｎ）は装置全体、（ｂ）は放電部の
拡大断面図である。放電管本体（１ａ）部具外は第３図
と同様であるため説明を省略する。第１図において放ｆ
Ｗ管（２ａ）の外周に金属電極（３０）。In FIG. 1, (n) is an enlarged sectional view of the entire device, and (b) is an enlarged sectional view of the discharge section. The parts of the discharge tube main body (1a) other than the parts are the same as those shown in FIG. 3, so a description thereof will be omitted. In Figure 1, the radiation f
A metal electrode (30) is placed on the outer periphery of the W tube (2a).
（４０）が交流電源（１００Ｋ Ｈｚ程度） （１４０
）を介して接続されており、放電管（２）内で無声放電
が発生しレーザ媒質を励起する。また、ガス流を安定化
させるため放電管出口部にはディフューザ（１００）が
配設されている。(40) is an AC power supply (about 100KHz) (140
), and a silent discharge is generated within the discharge tube (2) to excite the laser medium. Furthermore, a diffuser (100) is provided at the outlet of the discharge tube to stabilize the gas flow.
本実施例ではガス流に対し横方向に放電するためギャッ
プ長ｄは１０数−程度であり、放電安定性の指標もある
ｐｄ８１は１００ ｉＴｏｒｒ−ａｍ ｌ程度と従来の
１７１０以下にて構成されているため放電は非常に安定
であり、ガスの乱流化の必要は全くない。In this example, the gap length d is about 10-odds because the discharge is carried out in a direction transverse to the gas flow, and PD81, which is also an indicator of discharge stability, is about 100 iTorr-am l, which is less than the conventional 1710. Therefore, the discharge is very stable, and there is no need to create turbulence in the gas.
そこでガスの流れの状態を変化すべくディフューザの拡
がり角を変化させてレーザ出力及びビームモードの短時
間変動を調べたものが第２図である。Therefore, in order to change the state of gas flow, the divergence angle of the diffuser was changed, and short-term fluctuations in laser output and beam mode were investigated, as shown in FIG.
図においてディフューザを用いない場合（第２図（ａ）
、１８０’拡大）はレーザ出力及びビームモードは従来
装置と同様大きな変動を示しその変動率は３０数程度で
ある。第２図（ｂ）、（ｃ）。In the case where a diffuser is not used in the figure (Figure 2 (a)
, 180' enlarged), the laser output and beam mode show large fluctuations, similar to the conventional device, and the fluctuation rate is about 30. Figure 2 (b), (c).
（ｄ）より明らかなように、ディフューザの拡り角の減
少（３０°→２０°→１０°）とともにこれらの変動は
減少する傾向にあり、特にディツユ−上角１０°以内で
は非常に安定した出力ビーム゛ が得られることが判明
している。(d) As is clearer, these fluctuations tend to decrease as the divergence angle of the diffuser decreases (30° → 20° → 10°), and especially within the upper diffuser angle of 10°, the fluctuations are very stable. It has been found that an output beam ゛ is obtained.
なお、上記実施例では無声放電励起Ｇｏ、レーザの場合
について示したが他の放電励起（ＤＣグロー放電、ＲＦ
放電マイクロ波放電）でも同様の効果を奏し、また他の
レーザ（たとえばＣＯレーザ）でも同様である。In the above embodiment, the case of silent discharge excitation Go and laser was shown, but other discharge excitations (DC glow discharge, RF
A similar effect can be achieved with a discharge (microwave discharge), and also with other lasers (for example, a CO laser).
以上のように、この発明によればガス流に対し横方向に
放電させることにより放電を安定化せしめ、かつ放電部
出口にディフューザを設置することによりガス流を安定
化させたため、レーザ出力及びビームモードの短時間変
動は激減され、加工精度の高いレーザ発振器が得られろ
という効果が得られている。As described above, according to the present invention, the discharge is stabilized by discharging in the lateral direction with respect to the gas flow, and the gas flow is stabilized by installing a diffuser at the outlet of the discharge section, so that the laser output and the beam Short-term fluctuations in modes are drastically reduced, and the effect is that a laser oscillator with high processing accuracy can be obtained.
第１図（ａ）、（ｂ）はこの発明の一実施例による無声
放電励起ＣＯ２レーザ発振器及び放電部を示す拡大断面
側面図、第２図はディフューザの影響について示した説
明図、第３図は従来の高速軸流型発振器を示す図である
。
なお、図中同一符号は同一または相当部分を示す。
（１ａ）放電管本体、（２ａ）・放電管、（３０） 、
（４０）・・金属電極、（１００）−・ディフューザ
。
代理人 弁理士 佐 藤 正 年
第
（ａ）
３０．４０：企萬電謹
９：烈交濾器
１０１１：
１３：ｎ”スジ糺方頗
１ｏＯ：テ°イフユープ゛′
１図
第
（ａ）１８０° （ｂ） ３０’
ｔ １
２図
肩怖帽的９品喰 □
−１−ｔ
（特許法第１７条の２
手続補正書
１、事件の表示
特願昭６１−０４１５８５号
２、発明の名称
高速軸流型ガスレーザ装置
３、補正をする者
事件との関係 特許出願人
名 称 （ＧＯＩ）三菱電機株式会社４、代理人
住 所 東京都港区虎の門五丁目８番６号５、補正の
対象
明細書の［特ｉｉ’Ｆ ＋ｊｊ’ｊ求の範囲」及び「発
明の詳細な説明」の各欄
６、補正の内容
（１）明細書の特許請求の範囲を別紙の通り訂正する。
（２）明細書第２頁第１２行の「安定抵抗」を、「安定
化抵抗」に訂正する。
（３）明細書第４頁第４行の「放電方向・・・」から第
５行の「・・・共に」までを、削除する。
（４）明細書第４頁第９行の「放電・・・」から第１２
行の「・・・逆の思想で」までを、削除する。
（５）明細書第６頁第１１行の「ガス流・・・」から第
１３行の「・・・かつ」までを、削除する。
別 紙
特許請求の範囲
（１）光軸方向とガスの流れ方向が一致し、放電管内を
１００ ｍ／ｓ以上の高速でガスを循環させる高速軸流
型レーザ装置において、旌に放電管の終端部に、断面を
徐々に拡げた放電聞出口を設けたことを特徴とする高速
軸流型ガスレーザ装置。
（２）放電部出口見拡大角が１０°以内であることを特
徴とする特許請求の範囲第１項記載の高速軸流型ガスレ
ーザ装置。1(a) and 1(b) are enlarged cross-sectional side views showing a silent discharge pumped CO2 laser oscillator and a discharge part according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the influence of a diffuser, and FIG. 3 1 is a diagram showing a conventional high-speed axial flow type oscillator. Note that the same reference numerals in the figures indicate the same or corresponding parts. (1a) Discharge tube body, (2a) Discharge tube, (30),
(40)--Metal electrode, (100)--Diffuser. Agent Patent Attorney Tadashi Sato Year (a) 30.40: Corporate Management 9: Retsuko Filter 1011: 13: n” Suji 纺方頗 1oO: Te ° Ifup' 1 Figure (a) 180° (b) 30' t 1 2 9-item eating with a shoulder cap □ -1-t (Article 17-2 of the Patent Act Procedural amendment 1, Indication of case Patent application No. 61-041585 2, Name of invention High speed Axial flow gas laser device 3, relationship with the case of the person making the amendment Patent applicant name (GOI) Mitsubishi Electric Corporation 4, agent address 5-8-6 Toranomon, Minato-ku, Tokyo, subject of amendment Contents of amendments to column 6 of [Special Scope of Claims] and [Detailed Description of the Invention] of the specification (1) The scope of claims in the specification will be corrected as shown in the attached sheet. (2 ) Correct "stabilizing resistor" on page 2, line 12 of the specification to "stabilizing resistor". (3) From "discharge direction..." on page 4, line 4 of the specification to " . . . . . . ” (4) Page 4 of the specification, page 4, line 9, from “discharge...” to 12
Delete the line up to ``...with the opposite idea''. (5) Delete "gas flow..." on page 6, line 11 of the specification to "...and" on line 13. Attachment Claims (1) In a high-speed axial flow laser device in which the optical axis direction and the gas flow direction match and the gas is circulated at a high speed of 100 m/s or more in the discharge tube, the terminal end of the discharge tube is A high-speed axial flow gas laser device characterized by having a discharge outlet whose cross section gradually widens in its section. (2) The high-speed axial flow gas laser device according to claim 1, wherein the viewing angle at the exit of the discharge section is within 10 degrees.
Claims (2)
１００ｍ／ｓ以上の高速でガスを循環させる高速軸流型
レーザ装置において、ガス流に対し横方向に放電励起さ
せる手段を設けると共に、放電部出口の管路断面を徐々
に拡げた放電部出口を設けたことを特徴とする高速軸流
型ガスレーザ装置。(1) In a high-speed axial flow laser device in which the optical axis direction and the gas flow direction match and the gas is circulated at a high speed of 100 m/s or more in the discharge tube, a means for exciting the discharge in the lateral direction to the gas flow is provided. A high-speed axial flow gas laser device is also provided with a discharge section outlet in which a pipe cross section of the discharge section outlet is gradually widened.
徴とする特許請求の範囲第１項記載の高速軸流型ガスレ
ーザ装置。(2) The high-speed axial flow gas laser device according to claim 1, wherein the expansion angle of the outlet of the discharge section is within 10 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4158586A JPS62200780A (en) | 1986-02-28 | 1986-02-28 | High-speed axial-flow-type gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4158586A JPS62200780A (en) | 1986-02-28 | 1986-02-28 | High-speed axial-flow-type gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62200780A true JPS62200780A (en) | 1987-09-04 |
| JPH0335837B2 JPH0335837B2 (en) | 1991-05-29 |
Family
ID=12612509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4158586A Granted JPS62200780A (en) | 1986-02-28 | 1986-02-28 | High-speed axial-flow-type gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62200780A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7865979B2 (en) * | 2007-07-10 | 2011-01-11 | Hand Douglas P | Flush valve structure for a toilet tank |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3492597A (en) * | 1966-08-01 | 1970-01-27 | Trw Inc | Ceramic tube for gas ion laser |
| JPS57159076A (en) * | 1981-02-25 | 1982-10-01 | Rekuseru Corp | Laser device |
| JPS60178681A (en) * | 1984-02-24 | 1985-09-12 | Mitsubishi Electric Corp | Gas laser device |
| JPS61201361U (en) * | 1985-06-04 | 1986-12-17 |
-
1986
- 1986-02-28 JP JP4158586A patent/JPS62200780A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3492597A (en) * | 1966-08-01 | 1970-01-27 | Trw Inc | Ceramic tube for gas ion laser |
| JPS57159076A (en) * | 1981-02-25 | 1982-10-01 | Rekuseru Corp | Laser device |
| JPS60178681A (en) * | 1984-02-24 | 1985-09-12 | Mitsubishi Electric Corp | Gas laser device |
| JPS61201361U (en) * | 1985-06-04 | 1986-12-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0335837B2 (en) | 1991-05-29 |
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