JPS6184862A - 光電変換装置の製造方法 - Google Patents
光電変換装置の製造方法Info
- Publication number
- JPS6184862A JPS6184862A JP59207348A JP20734884A JPS6184862A JP S6184862 A JPS6184862 A JP S6184862A JP 59207348 A JP59207348 A JP 59207348A JP 20734884 A JP20734884 A JP 20734884A JP S6184862 A JPS6184862 A JP S6184862A
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- layer
- light
- photo
- shielding layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 45
- 238000005286 illumination Methods 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 38
- 150000001875 compounds Chemical class 0.000 claims description 5
- 239000011241 protective layer Substances 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 230000004913 activation Effects 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 238000002844 melting Methods 0.000 abstract description 3
- 229910052715 tantalum Inorganic materials 0.000 abstract description 3
- 229910052721 tungsten Inorganic materials 0.000 abstract description 3
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 230000008018 melting Effects 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- -1 Cd5-CdSe Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Facsimile Heads (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59207348A JPS6184862A (ja) | 1984-10-02 | 1984-10-02 | 光電変換装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59207348A JPS6184862A (ja) | 1984-10-02 | 1984-10-02 | 光電変換装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184862A true JPS6184862A (ja) | 1986-04-30 |
| JPH0564468B2 JPH0564468B2 (fr) | 1993-09-14 |
Family
ID=16538246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59207348A Granted JPS6184862A (ja) | 1984-10-02 | 1984-10-02 | 光電変換装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184862A (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63128748A (ja) * | 1986-11-19 | 1988-06-01 | Ricoh Co Ltd | 密着型イメ−ジセンサ |
| US4940888A (en) * | 1988-03-14 | 1990-07-10 | Hitachi, Ltd. | Direct-contact-type image sensor and image sensor assembly |
| US5162644A (en) * | 1988-03-14 | 1992-11-10 | Hitachi, Ltd. | Contact type image sensor having photoelectric conversion elements to reduce signal variation caused by luminous intensity variation of light source |
| GB2353140A (en) * | 1999-07-19 | 2001-02-14 | Agilent Technologies Inc | Tungsten or titanium-tungsten optical barrier in dark pixel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840856A (ja) * | 1981-09-03 | 1983-03-09 | Nippon Telegr & Teleph Corp <Ntt> | 光センサアレイ |
| JPS5856363A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | 受光素子 |
| JPS59151456A (ja) * | 1983-02-17 | 1984-08-29 | Nec Corp | 混成集積化光センサ用光電変換素子とその製造方法 |
-
1984
- 1984-10-02 JP JP59207348A patent/JPS6184862A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840856A (ja) * | 1981-09-03 | 1983-03-09 | Nippon Telegr & Teleph Corp <Ntt> | 光センサアレイ |
| JPS5856363A (ja) * | 1981-09-30 | 1983-04-04 | Hitachi Ltd | 受光素子 |
| JPS59151456A (ja) * | 1983-02-17 | 1984-08-29 | Nec Corp | 混成集積化光センサ用光電変換素子とその製造方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63128748A (ja) * | 1986-11-19 | 1988-06-01 | Ricoh Co Ltd | 密着型イメ−ジセンサ |
| US4940888A (en) * | 1988-03-14 | 1990-07-10 | Hitachi, Ltd. | Direct-contact-type image sensor and image sensor assembly |
| US4977313A (en) * | 1988-03-14 | 1990-12-11 | Hitachi, Ltd. | Facsimile equipment with direct-contact-type image sensor |
| US5162644A (en) * | 1988-03-14 | 1992-11-10 | Hitachi, Ltd. | Contact type image sensor having photoelectric conversion elements to reduce signal variation caused by luminous intensity variation of light source |
| GB2353140A (en) * | 1999-07-19 | 2001-02-14 | Agilent Technologies Inc | Tungsten or titanium-tungsten optical barrier in dark pixel |
| US6326601B1 (en) | 1999-07-19 | 2001-12-04 | Agilent Technologies, Inc. | Optical barrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0564468B2 (fr) | 1993-09-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |