JPS6183069U - - Google Patents
Info
- Publication number
- JPS6183069U JPS6183069U JP16882284U JP16882284U JPS6183069U JP S6183069 U JPS6183069 U JP S6183069U JP 16882284 U JP16882284 U JP 16882284U JP 16882284 U JP16882284 U JP 16882284U JP S6183069 U JPS6183069 U JP S6183069U
- Authority
- JP
- Japan
- Prior art keywords
- main discharge
- ionization
- electrodes
- electrode
- circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
Landscapes
- Lasers (AREA)
Description
第１図および第２図はそれぞれ本考案の第１及
び第２の実施例の模式的な横断面図、第３図は第
２図の部分斜視図、第４図は従来の主放電回路中
に予備電離用アークギヤツプを含む紫外線自動予
備電離・容量移行型励起回路使用のパルスガスレ
ーザ装置の模式的な横断面図、第５図は従来の主
放電回路中に予備電離用アークギヤツプを含まな
いパルスガスレーザ装置の模式的な横断面図、第
６図は第５図の部分斜視図である。図において、
１……第１の主放電電極、２……第２の主放電電
極、３……ピーキングコンデンサ、４……充電コ
ンデンサ、５……スイツチング回路、６……ＬＲ
回路、７……高電圧電源、８……ストリツプライ
ン、９……予備電離用電極対、１０……予備電離
用アークギヤツプ、１１……主放電空間、１２…
…ガス循環器、１３……熱交換器、１４……レー
ザ管、１５……第１の予備電離用電極、１６……
第２の予備電離用電極、である。
1 and 2 are schematic cross-sectional views of the first and second embodiments of the present invention, FIG. 3 is a partial perspective view of FIG. 2, and FIG. 4 is a conventional main discharge circuit. 5 is a schematic cross-sectional view of a pulsed gas laser device using an ultraviolet automatic preionization/capacitance transfer type excitation circuit that includes a preionization arc gap, and FIG. 5 shows a conventional pulsed gas laser device that does not include a preionization arc gap in the main discharge circuit. A schematic cross-sectional view of the device, FIG. 6 is a partial perspective view of FIG. 5. In the figure,
DESCRIPTION OF SYMBOLS 1... First main discharge electrode, 2... Second main discharge electrode, 3... Peaking capacitor, 4... Charging capacitor, 5... Switching circuit, 6... LR
Circuit, 7... High voltage power supply, 8... Stripline, 9... Electrode pair for pre-ionization, 10... Arc gap for pre-ionization, 11... Main discharge space, 12...
...Gas circulator, 13... Heat exchanger, 14... Laser tube, 15... First pre-ionization electrode, 16...
This is the second pre-ionization electrode.
Claims (1)
および第２の主放電電極と、前記主放電の放電空
間近傍でこの主放電空間をこの主放電に先立ち予
め電離する複数の予備電離回路と、一対の前記主
放電電極と接続されこれらの電極間に放電を励起
させる容量移行型励起回路とを備えたパルスガス
レーザ装置において；前記励起回路は、一端が第
２の主放電電極と接続され他端に高圧電源の印加
された充電コンデンサと、この充電コンデンサの
他端と前記高圧電源とに一端が接続されたスイツ
チング回路と、このスイツチング回路の他端と前
記充電コンデンサの他端とを抵抗あるいはインダ
クタンスで接続する充電回路と、前記第１および
第２の主放電電極とそれぞれ並列接続された複数
のピーキングコンデンサとを含み；前記複数の予
備電離回路は、複数の前記ピーキングコンデンサ
の前記第２の主放電電極との各接続部の導体部を
兼ねた複数の第１の予備電離用電極と、これら第
１の予備電離用電極とそれぞれアークギヤツプを
形成して対向され前記スイツチ回路の他端にスト
リツプラインを介してそれぞれ接続された複数の
第２の予備電離用電極とを含むことを特徴とする
パルスガスレーザ装置。 The first step is to obtain the main discharge inside the gas-filled laser tube.
and a second main discharge electrode, a plurality of pre-ionization circuits that ionize the main discharge space in advance of the main discharge near the discharge space of the main discharge, and a plurality of pre-ionization circuits connected to the pair of the main discharge electrodes and between these electrodes. A pulsed gas laser device comprising a capacitance transfer type excitation circuit that excites discharge; a switching circuit having one end connected to the other end of the capacitor and the high-voltage power supply; a charging circuit connecting the other end of the switching circuit and the other end of the charging capacitor through a resistor or inductance; and a plurality of peaking capacitors connected in parallel to each of the main discharge electrodes; the plurality of pre-ionization circuits also serve as conductor portions of the respective connections between the plurality of peaking capacitors and the second main discharge electrode. a plurality of first pre-ionization electrodes, and a plurality of second electrodes each facing the first pre-ionization electrodes forming an arc gap and connected to the other end of the switch circuit via a stripline. A pulsed gas laser device comprising a preliminary ionization electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16882284U JPS6183069U (en) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16882284U JPS6183069U (en) | 1984-11-07 | 1984-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183069U true JPS6183069U (en) | 1986-06-02 |
Family
ID=30726584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16882284U Pending JPS6183069U (en) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183069U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988000403A1 (en) * | 1986-06-30 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Gas laser |
| JPS63197371U (en) * | 1987-06-08 | 1988-12-19 |
-
1984
- 1984-11-07 JP JP16882284U patent/JPS6183069U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988000403A1 (en) * | 1986-06-30 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Gas laser |
| JPS63197371U (en) * | 1987-06-08 | 1988-12-19 |
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