JPH0273752U - - Google Patents
Info
- Publication number
- JPH0273752U JPH0273752U JP15362688U JP15362688U JPH0273752U JP H0273752 U JPH0273752 U JP H0273752U JP 15362688 U JP15362688 U JP 15362688U JP 15362688 U JP15362688 U JP 15362688U JP H0273752 U JPH0273752 U JP H0273752U
- Authority
- JP
- Japan
- Prior art keywords
- ionization
- coil
- laser oscillation
- power supply
- voltage power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Lasers (AREA)
Description
第１図イはこの考案の一実施例であるエキシマ
レーザ発振装置の主要部の概略構成を説明するた
めの図、同図ロは同図イのピンとコイルを組合わ
せて１ユニツトとした部分の詳細を示す断面図、
第２図イは従来のエキシマレーザ発振装置の概略
構成を説明するための図、同図ロは同図イの等価
回路図、同図ハは同図ロの主要部の詳細を示す等
価回路図である。
図中、１：外箱、２：ガスチエンバ、５，５′
，１７：基板、６：主コンデンサ、７，７′，８
：予備電離用のピン、９：放電用コンデンサ、１
０，１３：コイル、１１，１２：主電極、１５：
高電圧電源。
Figure 1A is a diagram for explaining the schematic configuration of the main parts of an excimer laser oscillation device, which is an embodiment of this invention, and Figure 1B is a diagram of the part in which the pins and coils in Figure 1A are combined into one unit. Cross section showing details,
Figure 2A is a diagram for explaining the schematic configuration of a conventional excimer laser oscillation device, Figure 2B is an equivalent circuit diagram of Figure 2A, and Figure 2C is an equivalent circuit diagram showing details of the main parts of Figure 2B. It is. In the figure, 1: Outer box, 2: Gas chamber, 5, 5'
, 17: Board, 6: Main capacitor, 7, 7', 8
: Pre-ionization pin, 9: Discharge capacitor, 1
0, 13: Coil, 11, 12: Main electrode, 15:
High voltage power supply.
Claims (1)
える主コンデンサとを有し、この主コンデンサか
らの電流によりエキシマガスを予備電離させる複
数の予備電離用のピンがコイルを介して並列に設
けられ、さらにこの予備電離用のピンによる予備
電離回路と直列に放電用コンデンサ及び一対の主
電極が設けられたエキシマレーザ発振回路におい
て、前記予備電離用のピンとコイルとが絶縁ブツ
シユによつて１ユニツトで構成されたことを特徴
とするエキシマレーザ発振装置。 It has a high-voltage power supply and a main capacitor that stores charge from the high-voltage power supply, and a plurality of pre-ionization pins that pre-ionize the excimer gas with the current from the main capacitor are provided in parallel via a coil. Furthermore, in an excimer laser oscillation circuit in which a discharge capacitor and a pair of main electrodes are provided in series with a pre-ionization circuit using this pre-ionization pin, the pre-ionization pin and the coil are integrated into one unit by an insulating bushing. An excimer laser oscillation device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362688U JPH0273752U (en) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362688U JPH0273752U (en) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273752U true JPH0273752U (en) | 1990-06-05 |
Family
ID=31429640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15362688U Pending JPH0273752U (en) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273752U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0467693A (en) * | 1990-07-09 | 1992-03-03 | Mitsubishi Electric Corp | Discharge exciting laser device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63217682A (en) * | 1987-03-06 | 1988-09-09 | Agency Of Ind Science & Technol | Gas laser oscillator |
-
1988
- 1988-11-28 JP JP15362688U patent/JPH0273752U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63217682A (en) * | 1987-03-06 | 1988-09-09 | Agency Of Ind Science & Technol | Gas laser oscillator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0467693A (en) * | 1990-07-09 | 1992-03-03 | Mitsubishi Electric Corp | Discharge exciting laser device |
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