JPH0467797B2 - - Google Patents
Info
- Publication number
- JPH0467797B2 JPH0467797B2 JP8123585A JP8123585A JPH0467797B2 JP H0467797 B2 JPH0467797 B2 JP H0467797B2 JP 8123585 A JP8123585 A JP 8123585A JP 8123585 A JP8123585 A JP 8123585A JP H0467797 B2 JPH0467797 B2 JP H0467797B2
- Authority
- JP
- Japan
- Prior art keywords
- main discharge
- capacitor
- container
- gas laser
- discharge electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003990 capacitor Substances 0.000 claims description 27
- 230000010355 oscillation Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 本発明はガスレーザ発振装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a gas laser oscillation device.
レーザ発振方向に対して垂直方向に対して垂直
方向に放電を発生させる横方向励起ガスレーザ
で、大気圧以上の比較的高い圧力で動作する装置
では、放電を安定化するための予備電離が必要で
ある。この予備電離にはいろいろな種類があり、
主電極と平行にピン電極を配置した紫外光予備電
離方式もその一つである。この方式による従来例
について第4図にて説明する。すなわち、円筒形
の気密構造になる容器1を有し、この容器1には
例えばCO2,H2,He2の3種のガスを所定の割合
で混合したガスレーザ媒質がほぼ大気圧に保持さ
れて封入されている。また、容器1内には次の各
要素が互いに関係ずけられて配置されている。す
なわち、金属製の一対の保持板2a,2bが間隔
をおき、かつ平行になつて容器1の内壁に取り付
けられている。一方の保持板2aは他方の保持板
2bに対向側において同じく金属製の取り付け板
3と組合つて絶縁物4を挟装している。取り付け
板3は絶縁物4により容器1と絶縁されている。
取り付け板3には主放電電極の一方をなすかまぼ
こ状陰極5が設けられ、この陰極に対向して他方
をなす同じくかまぼこ状の陽極6が保持板2bに
取り付けられている。保持板2bと取り付け板3
に予備放電のためのピン電極7a,7bがそれぞ
れ対になつて容器1の軸方向に沿つて多数配置さ
れている。陰極5側になる一方のピン電極7aに
は予備放電時の不必要なエネルギ消費を防止する
第1のキヤパシタ8がそれぞれ接続されている。
また、陰極5にはアースされた高圧のパルス電源
9より高圧が印加されている。また、容器1およ
び陽極6もそれぞれアースされている。
A horizontally excited gas laser generates a discharge in a direction perpendicular to the laser oscillation direction, and in devices that operate at relatively high pressures above atmospheric pressure, pre-ionization is required to stabilize the discharge. be. There are various types of this pre-ionization.
One such method is an ultraviolet light preionization method in which a pin electrode is placed parallel to the main electrode. A conventional example using this method will be explained with reference to FIG. That is, the container 1 has a cylindrical airtight structure, and in this container 1, a gas laser medium in which three types of gases, for example, CO 2 , H 2 , and He 2 are mixed at a predetermined ratio, is maintained at approximately atmospheric pressure. It is enclosed. Further, within the container 1, the following elements are arranged in relation to each other. That is, a pair of metal holding plates 2a and 2b are attached to the inner wall of the container 1 in a spaced apart and parallel manner. One retaining plate 2a is combined with a metal mounting plate 3 on the opposite side to the other retaining plate 2b, and an insulator 4 is sandwiched therebetween. The mounting plate 3 is insulated from the container 1 by an insulator 4.
A semi-cylindrical cathode 5 forming one of the main discharge electrodes is provided on the mounting plate 3, and an anode 6, also semi-cylindrical, forming the other main discharge electrode is attached to the holding plate 2b, facing the cathode. Holding plate 2b and mounting plate 3
A large number of pin electrodes 7a and 7b for preliminary discharge are arranged in pairs along the axial direction of the container 1. A first capacitor 8 for preventing unnecessary energy consumption during preliminary discharge is connected to one of the pin electrodes 7a on the cathode 5 side.
Further, a high voltage is applied to the cathode 5 from a grounded high voltage pulse power source 9. Further, the container 1 and the anode 6 are also each grounded.
上記の構成において、第1のキヤパシタ8は主
放電と予備放電とのタイミングをとり、さらに主
放電の電流ピークを大きくするために用いられて
いるが、この容量は主放電用コンデンサ(図示せ
ず)と同程度に大きくすることが望まれている。
しかし、キヤパシタの容量を増すことは寸法的に
も大きくなり、容器1が大形になつてしまう。逆
に第1のキヤパシタ8を小型にして多数配置する
にしても上記構成では限度があり、また、主放電
域に流れるガスレーザ媒質の流れが阻害されてし
まう問題が生じる。 In the above configuration, the first capacitor 8 is used to adjust the timing of the main discharge and preliminary discharge, and to increase the current peak of the main discharge. ) is desired to be as large as .
However, increasing the capacity of the capacitor also increases its dimensions, resulting in the container 1 becoming larger. On the other hand, even if the first capacitors 8 are made small and arranged in large numbers, there is a limit in the above configuration, and the problem arises that the flow of the gas laser medium flowing into the main discharge region is obstructed.
本発明は予備放電を必要最小限におさえ、かつ
主放電部には最大限にエネルギを供給できるガス
レーザ発振装置を提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a gas laser oscillation device that can suppress preliminary discharge to the necessary minimum and supply maximum energy to the main discharge section.
上記目的を達成するために、高電圧側電極を絶
縁物を用いることなくキヤパシタで保持する構成
にしたものである。
In order to achieve the above object, the high voltage side electrode is held by a capacitor without using an insulator.
以下、本発明を実施例を示す図面に基いて説明
する。
Hereinafter, the present invention will be explained based on drawings showing examples.
第1図は本発明の一実施例で第4図と共通する
部分には同一符号を付し詳細な説明は省略する。
すなわち、第4図に示した構成と異なるところ
は、保持板2aと取り付け板3との間に絶縁物で
なく第2のキヤパシタ10をその両端を上記それ
ぞれの板に接続して介在させた点と、保持板2
a,2b間を銅製の一対のリード板11a,11
bで接続し、これらで風洞を形成した点にある。
ここで、上記実施例を等価回路的に示すと第2図
のようになる。ただし、この回路図では第1,第
2のキヤパシタ8,10は多数配置したときの等
価容量を表わしている。この回路について説明す
ると、高圧パルス電源9は高圧電源9aと充電抵
抗12および主放電キヤパシタ13とで構成さ
れ、主放電キヤパシタの充電電荷が陰極5,陽極
6に流れるように回路を構成している。ここで、
陽極6側の線路には主放電キヤパシタ13側から
キヤツプスイツチ14,インダクタンス15およ
び16が接続されている。インダクタンス15と
16との間において、第1のキヤパシタ8を介し
たピン電極7a,7bが上記回路に接続されてい
る。また、陰極5,陽極6には上記回路に接続し
た第2のキヤパシタ10がインダクタンス16を
介して並列に接続されている。以上の構成になる
回路の作用について次に説明する。高圧電源9a
によつて主放電キヤパシタ13が十分に充電さ
れ、ギヤツプスイツチ14が適当な時間に点火し
たものと仮定する。主放電キヤパシタ13の電荷
はインダクタンス15,16,17を通して第
1,第2のキヤパシタ8,10にそれぞれ移じよ
うする。この場合、移じよう率を主放電キヤパシ
タの充電電荷量と、第1,第2のキヤパシタ8,
10へ移じようした電荷量の比として表わすと、
移じよう率は第1,第2のキヤパシタ8,10の
並列容量と主放電キヤパシタが等しいとき最大と
なることは周知であるから、容器1内における容
量を第1,第2のキヤパシタ8,10のように分
割することで、比較的簡単な調整で移じよう率を
最大にすることが可能となる。この場合、第2の
キヤパシタ10の方を可及的に少ない容量にして
第1のキヤパシタ8を大きくすれば予備放電に必
要以上のエネルギを浪費することなく、最大の移
じよう率を達成することができる。 FIG. 1 shows an embodiment of the present invention, and parts common to those in FIG. 4 are denoted by the same reference numerals, and detailed description thereof will be omitted.
That is, the difference from the configuration shown in FIG. 4 is that a second capacitor 10, instead of an insulator, is interposed between the holding plate 2a and the mounting plate 3, with both ends connected to the respective plates. and retaining plate 2
A pair of copper lead plates 11a, 11 are connected between a and 2b.
They are connected at point b, and they form a wind tunnel.
Here, an equivalent circuit diagram of the above embodiment is shown in FIG. 2. However, in this circuit diagram, the first and second capacitors 8 and 10 represent the equivalent capacitance when a large number of them are arranged. To explain this circuit, the high-voltage pulse power supply 9 is composed of a high-voltage power supply 9a, a charging resistor 12, and a main discharge capacitor 13, and the circuit is configured so that the charge of the main discharge capacitor flows to the cathode 5 and the anode 6. . here,
A cap switch 14 and inductances 15 and 16 are connected to the line on the anode 6 side from the main discharge capacitor 13 side. Between the inductances 15 and 16, pin electrodes 7a and 7b are connected to the circuit via the first capacitor 8. Further, a second capacitor 10 connected to the above circuit is connected in parallel to the cathode 5 and anode 6 via an inductance 16. The operation of the circuit configured as above will be explained next. High voltage power supply 9a
It is assumed that the main discharge capacitor 13 is sufficiently charged by the above steps and that the gear switch 14 is ignited at an appropriate time. The charge in the main discharge capacitor 13 is transferred to the first and second capacitors 8 and 10 through inductances 15, 16, and 17, respectively. In this case, the transfer rate is determined by the charge amount of the main discharge capacitor and the charge amount of the first and second capacitors 8,
Expressed as a ratio of the amount of charge transferred to 10,
It is well known that the transfer rate is maximum when the parallel capacitance of the first and second capacitors 8 and 10 is equal to the main discharge capacitor. By dividing into 10, it is possible to maximize the transfer rate with relatively simple adjustment. In this case, by making the second capacitor 10 as small in capacity as possible and increasing the first capacitor 8, the maximum transfer rate can be achieved without wasting more energy than necessary for preliminary discharge. be able to.
一方、線路のインダクタンス15,16,17
の値をそれぞれl1,l2,l3とするとこれらの値は
上記回路構成からl1≫l2>l3であるから、主放電
開始後、陰極5,陽極6間を流れる電流は第4図
に示すようにi1,i2,i3の合成であるから、放電
電流は線路のインダクタンスの大小にかかわら
ず、有効に利用され、安定な放電が維持される。
これを、エキシマレーザでは従来の倍近い出力エ
ネルギを得ることができた。 On the other hand, the line inductance 15, 16, 17
Assuming that the values of are l 1 , l 2 , and l 3 respectively, these values are l 1 ≫ l 2 > l 3 from the above circuit configuration, so after the main discharge starts, the current flowing between the cathode 5 and the anode 6 is As shown in Fig. 4, since it is a combination of i 1 , i 2 , and i 3 , the discharge current is effectively used regardless of the magnitude of the line inductance, and stable discharge is maintained.
With an excimer laser, we were able to obtain nearly twice the output energy of conventional lasers.
以上詳述したように、第2のキヤパシタを付加
し、これを高電圧側電極である陰極を保持する構
造としたため、容器内の等価容量の増減が非常に
容易となり、同じ等価容量で比較した場合、極め
て小型な構造にすることができた。
As detailed above, by adding the second capacitor and using it as a structure to hold the cathode, which is the high voltage side electrode, it is very easy to increase or decrease the equivalent capacitance inside the container. In this case, an extremely compact structure could be achieved.
第1図は本発明の一実施例を示す横断面図、第
2図は同実施例の回路図、第3図は電流波形図、
第4図は従来例を示す横断面図である。
1……容器、5……陰極、6……陽極、7a,
7b……ピン電極、8……第1のキヤパシタ、9
……パルス電極、10……第2のキヤパシタ。
FIG. 1 is a cross-sectional view showing an embodiment of the present invention, FIG. 2 is a circuit diagram of the same embodiment, and FIG. 3 is a current waveform diagram.
FIG. 4 is a cross-sectional view showing a conventional example. 1... Container, 5... Cathode, 6... Anode, 7a,
7b... Pin electrode, 8... First capacitor, 9
...Pulse electrode, 10...Second capacitor.
Claims (1)
入した容器と、この容器内に所定の間隔をおいて
対向配置される陰極および陽極からなる主放電電
極と、主放電域およびその近傍を予備電離する予
備放電電極と、この予備放電電極に接続される第
1のキヤパシタと、上記主放電電極に並列に接続
されかつこの主放電電極の高電圧側電極の背面側
を支持する位置に設けられ第2のキヤパシタと、
上記主放電電極にパルス状電圧を印加するパルス
電源とを備えたことを特徴とするガスレーザ発振
装置。 2 上記容器は円筒状金属パイプでできているこ
とを特徴とする特許請求の範囲第1項記載のガス
レーザ発振装置。[Scope of Claims] 1. A gas laser medium, a container enclosing the gas laser medium, a main discharge electrode consisting of a cathode and an anode arranged facing each other at a predetermined distance within the container, and a main discharge region and its vicinity. a first capacitor connected to the preliminary discharge electrode; and a first capacitor connected in parallel to the main discharge electrode and located at a position supporting the back side of the high voltage side electrode of the main discharge electrode. a second capacitor provided;
A gas laser oscillation device comprising: a pulse power source that applies a pulsed voltage to the main discharge electrode. 2. The gas laser oscillation device according to claim 1, wherein the container is made of a cylindrical metal pipe.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8123585A JPS61240690A (en) | 1985-04-18 | 1985-04-18 | Gas laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8123585A JPS61240690A (en) | 1985-04-18 | 1985-04-18 | Gas laser oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61240690A JPS61240690A (en) | 1986-10-25 |
JPH0467797B2 true JPH0467797B2 (en) | 1992-10-29 |
Family
ID=13740779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8123585A Granted JPS61240690A (en) | 1985-04-18 | 1985-04-18 | Gas laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61240690A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6313387A (en) * | 1986-07-03 | 1988-01-20 | Nec Corp | Pulse gas laser device |
JPS63288078A (en) * | 1987-05-20 | 1988-11-25 | Keisuke Sasaki | Oscillator for excimer laser |
JPS63299288A (en) * | 1987-05-29 | 1988-12-06 | Shibuya Kogyo Co Ltd | Pulsed gas laser device |
KR950000118B1 (en) * | 1991-02-08 | 1995-01-09 | 미쯔비시덴끼 가부시끼가이샤 | Pulse laser apparatus |
-
1985
- 1985-04-18 JP JP8123585A patent/JPS61240690A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61240690A (en) | 1986-10-25 |
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