JPH0265371U - - Google Patents
Info
- Publication number
- JPH0265371U JPH0265371U JP14338788U JP14338788U JPH0265371U JP H0265371 U JPH0265371 U JP H0265371U JP 14338788 U JP14338788 U JP 14338788U JP 14338788 U JP14338788 U JP 14338788U JP H0265371 U JPH0265371 U JP H0265371U
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- main discharge
- electrode
- saturable reactor
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第1図は、本考案に係る実施例を要部拡大して
示す斜視図、第2図は、第1図のA―A矢視断面
図、第3図、第4図は、他の実施例を示す断面図
、第5図は、放電励起型パルスレーザ装置の従来
例を示す回路図、第6図、第7図は、従来例を示
す斜視図である。
1A……可飽和リアクトル、2……内部導体、
3……外部導体、7……絶縁体、5……予備電離
電極、6……主放電電極、7……ピーキング・コ
ンデンサ、8,9……電極支持板、10……チヤ
ンバ、11……接続導体、12……サイラトロン
、13……チヤージング・キヤパシタ、14……
インダクタ、15……直流定電圧源、16……浮
遊インダクタ。
FIG. 1 is a perspective view showing an enlarged main part of an embodiment according to the present invention, FIG. 2 is a cross-sectional view taken along the line A-A in FIG. 1, and FIGS. 3 and 4 show other embodiments. FIG. 5 is a sectional view showing an example, FIG. 5 is a circuit diagram showing a conventional example of a discharge excited pulse laser device, and FIGS. 6 and 7 are perspective views showing the conventional example. 1A...Saturable reactor, 2...Inner conductor,
3... External conductor, 7... Insulator, 5... Pre-ionization electrode, 6... Main discharge electrode, 7... Peaking capacitor, 8, 9... Electrode support plate, 10... Chamber, 11... Connection conductor, 12... Thyratron, 13... Charging capacitor, 14...
Inductor, 15...DC constant voltage source, 16...Floating inductor.
Claims (1)
を電気スイツチング素子により、レーザ媒質ガス
の充填されたチヤンバ内に設けられる主放電電極
の電極支持板に接続媒体によつて接続される可飽
和リアクトルを介して複数のピーキング・キヤパ
シタに移し、これらピーキング・キヤパシタに直
列にかつ前記主放電電極に並列に接続される予備
電離電極のギヤツプの放電によりレーザ媒質ガス
が予備電離された後、前記ピーキング・キヤパシ
タの充電電圧が所定値に達したときに、前記主放
電電極間にグロー放電を生じてレーザ発振する放
電励起型パルスレーザ装置において、前記可飽和
リアクトルを前記主放電電済の長さと同程度の細
長い形状に構成し、その長定方向および幅方向の
中心線が前記予備電離電極群の長手方向および幅
方向の中心線と一致するように配設することを特
徴とする放電励起パルスレーザ装置。 The energy stored in the charging capacitor is transferred to multiple peaks by an electric switching element through a saturable reactor connected by a connecting medium to the electrode support plate of the main discharge electrode provided in the chamber filled with laser medium gas. - After the laser medium gas is pre-ionized by the gap discharge of the pre-ionization electrodes which are transferred to the capacitors and connected in series to these peaking capacitors and in parallel to the main discharge electrode, the charging voltage of the peaking capacitors is set to a predetermined value. In a discharge-excited pulsed laser device that generates a glow discharge between the main discharge electrodes and oscillates a laser when the saturable reactor reaches a certain value, the saturable reactor is configured to have an elongated shape comparable to the length of the main discharge electrode. A discharge-excited pulsed laser device, characterized in that the center line in the longitudinal direction and the width direction thereof is arranged so as to coincide with the center line in the longitudinal direction and the width direction of the pre-ionization electrode group.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14338788U JPH0265371U (en) | 1988-11-04 | 1988-11-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14338788U JPH0265371U (en) | 1988-11-04 | 1988-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0265371U true JPH0265371U (en) | 1990-05-16 |
Family
ID=31410166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14338788U Pending JPH0265371U (en) | 1988-11-04 | 1988-11-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0265371U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023181207A1 (en) * | 2022-03-23 | 2023-09-28 | ギガフォトン株式会社 | Gas laser device and electronic device manufacturing method |
-
1988
- 1988-11-04 JP JP14338788U patent/JPH0265371U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023181207A1 (en) * | 2022-03-23 | 2023-09-28 | ギガフォトン株式会社 | Gas laser device and electronic device manufacturing method |
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