JPS6182414A - パ−マロイ軟磁性膜の製造方法 - Google Patents
パ−マロイ軟磁性膜の製造方法Info
- Publication number
- JPS6182414A JPS6182414A JP20542984A JP20542984A JPS6182414A JP S6182414 A JPS6182414 A JP S6182414A JP 20542984 A JP20542984 A JP 20542984A JP 20542984 A JP20542984 A JP 20542984A JP S6182414 A JPS6182414 A JP S6182414A
- Authority
- JP
- Japan
- Prior art keywords
- film
- permalloy
- target voltage
- sputtering method
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000889 permalloy Inorganic materials 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 40
- 238000004544 sputter deposition Methods 0.000 claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 23
- 229910052786 argon Inorganic materials 0.000 claims abstract description 20
- 239000011261 inert gas Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 36
- 238000010586 diagram Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 244000125300 Argania sideroxylon Species 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 206010017577 Gait disturbance Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20542984A JPS6182414A (ja) | 1984-09-28 | 1984-09-28 | パ−マロイ軟磁性膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20542984A JPS6182414A (ja) | 1984-09-28 | 1984-09-28 | パ−マロイ軟磁性膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6182414A true JPS6182414A (ja) | 1986-04-26 |
| JPH0330970B2 JPH0330970B2 (enrdf_load_stackoverflow) | 1991-05-01 |
Family
ID=16506707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20542984A Granted JPS6182414A (ja) | 1984-09-28 | 1984-09-28 | パ−マロイ軟磁性膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6182414A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59146427A (ja) * | 1983-02-09 | 1984-08-22 | Comput Basic Mach Technol Res Assoc | 薄膜磁気ヘツドの製造方法 |
| JPS6025212A (ja) * | 1983-07-21 | 1985-02-08 | Hitachi Ltd | 磁性合金膜の製造方法 |
-
1984
- 1984-09-28 JP JP20542984A patent/JPS6182414A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59146427A (ja) * | 1983-02-09 | 1984-08-22 | Comput Basic Mach Technol Res Assoc | 薄膜磁気ヘツドの製造方法 |
| JPS6025212A (ja) * | 1983-07-21 | 1985-02-08 | Hitachi Ltd | 磁性合金膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330970B2 (enrdf_load_stackoverflow) | 1991-05-01 |
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