JPS6182414A - パ−マロイ軟磁性膜の製造方法 - Google Patents

パ−マロイ軟磁性膜の製造方法

Info

Publication number
JPS6182414A
JPS6182414A JP20542984A JP20542984A JPS6182414A JP S6182414 A JPS6182414 A JP S6182414A JP 20542984 A JP20542984 A JP 20542984A JP 20542984 A JP20542984 A JP 20542984A JP S6182414 A JPS6182414 A JP S6182414A
Authority
JP
Japan
Prior art keywords
film
permalloy
soft magnetic
target voltage
magnetic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20542984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330970B2 (enrdf_load_stackoverflow
Inventor
Ryoji Namikata
量二 南方
Toru Kira
吉良　徹
Mitsuhiko Yoshikawa
吉川　光彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP20542984A priority Critical patent/JPS6182414A/ja
Publication of JPS6182414A publication Critical patent/JPS6182414A/ja
Publication of JPH0330970B2 publication Critical patent/JPH0330970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP20542984A 1984-09-28 1984-09-28 パ−マロイ軟磁性膜の製造方法 Granted JPS6182414A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20542984A JPS6182414A (ja) 1984-09-28 1984-09-28 パ−マロイ軟磁性膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20542984A JPS6182414A (ja) 1984-09-28 1984-09-28 パ−マロイ軟磁性膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6182414A true JPS6182414A (ja) 1986-04-26
JPH0330970B2 JPH0330970B2 (enrdf_load_stackoverflow) 1991-05-01

Family

ID=16506707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20542984A Granted JPS6182414A (ja) 1984-09-28 1984-09-28 パ−マロイ軟磁性膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6182414A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146427A (ja) * 1983-02-09 1984-08-22 Comput Basic Mach Technol Res Assoc 薄膜磁気ヘツドの製造方法
JPS6025212A (ja) * 1983-07-21 1985-02-08 Hitachi Ltd 磁性合金膜の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146427A (ja) * 1983-02-09 1984-08-22 Comput Basic Mach Technol Res Assoc 薄膜磁気ヘツドの製造方法
JPS6025212A (ja) * 1983-07-21 1985-02-08 Hitachi Ltd 磁性合金膜の製造方法

Also Published As

Publication number Publication date
JPH0330970B2 (enrdf_load_stackoverflow) 1991-05-01

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