JPS6180024A - 表面弾性波圧力センサ - Google Patents

表面弾性波圧力センサ

Info

Publication number
JPS6180024A
JPS6180024A JP20376784A JP20376784A JPS6180024A JP S6180024 A JPS6180024 A JP S6180024A JP 20376784 A JP20376784 A JP 20376784A JP 20376784 A JP20376784 A JP 20376784A JP S6180024 A JPS6180024 A JP S6180024A
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
pressure sensor
frequency
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20376784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582536B2 (enrdf_load_stackoverflow
Inventor
Kenkichi Takadera
高寺　賢吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20376784A priority Critical patent/JPS6180024A/ja
Publication of JPS6180024A publication Critical patent/JPS6180024A/ja
Publication of JPH0582536B2 publication Critical patent/JPH0582536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20376784A 1984-09-27 1984-09-27 表面弾性波圧力センサ Granted JPS6180024A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20376784A JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20376784A JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Publications (2)

Publication Number Publication Date
JPS6180024A true JPS6180024A (ja) 1986-04-23
JPH0582536B2 JPH0582536B2 (enrdf_load_stackoverflow) 1993-11-19

Family

ID=16479477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20376784A Granted JPS6180024A (ja) 1984-09-27 1984-09-27 表面弾性波圧力センサ

Country Status (1)

Country Link
JP (1) JPS6180024A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2815117A1 (fr) * 2000-10-06 2002-04-12 Bosch Gmbh Robert Capteur de force
WO2003081195A1 (en) * 2002-03-21 2003-10-02 Transense Technologies Plc Pressure monitor incorporating saw device
WO2006125941A1 (en) * 2005-05-26 2006-11-30 Transense Technologies Plc Surface acoustic wave ( saw) based pressure sensor
WO2008041607A1 (en) * 2006-10-02 2008-04-10 Panasonic Electric Works Co., Ltd. Pressure sensor
JP2008128679A (ja) * 2006-11-16 2008-06-05 Matsushita Electric Works Ltd 圧力センサ
DE102010001128A1 (de) 2009-01-26 2010-12-02 Denso Corporation, Kariya-City Akustischer Oberflächenwellendrucksensor

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2815117A1 (fr) * 2000-10-06 2002-04-12 Bosch Gmbh Robert Capteur de force
WO2003081195A1 (en) * 2002-03-21 2003-10-02 Transense Technologies Plc Pressure monitor incorporating saw device
US7151337B2 (en) 2002-03-21 2006-12-19 Transense Technologies Plc Pressure monitor incorporating saw device
WO2006125941A1 (en) * 2005-05-26 2006-11-30 Transense Technologies Plc Surface acoustic wave ( saw) based pressure sensor
JP2008542701A (ja) * 2005-05-26 2008-11-27 トランセンス テクノロジーズ ピーエルシー 表面弾性波に基づく圧力センサ
US7841241B2 (en) 2005-05-26 2010-11-30 Transense Technologies Plc Surface acoustic wave (SAW) based pressure sensor
TWI411771B (zh) * 2005-05-26 2013-10-11 Transense Technologies Plc 壓力感測計
WO2008041607A1 (en) * 2006-10-02 2008-04-10 Panasonic Electric Works Co., Ltd. Pressure sensor
US7992445B2 (en) 2006-10-02 2011-08-09 Panasonic Electric Works Co., Ltd. Pressure sensor
JP2008128679A (ja) * 2006-11-16 2008-06-05 Matsushita Electric Works Ltd 圧力センサ
DE102010001128A1 (de) 2009-01-26 2010-12-02 Denso Corporation, Kariya-City Akustischer Oberflächenwellendrucksensor
US8006563B2 (en) 2009-01-26 2011-08-30 Denso Corporation Surface acoustic wave pressure sensor

Also Published As

Publication number Publication date
JPH0582536B2 (enrdf_load_stackoverflow) 1993-11-19

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