JPS6177709A - 表面粗さ計測装置 - Google Patents
表面粗さ計測装置Info
- Publication number
- JPS6177709A JPS6177709A JP20004884A JP20004884A JPS6177709A JP S6177709 A JPS6177709 A JP S6177709A JP 20004884 A JP20004884 A JP 20004884A JP 20004884 A JP20004884 A JP 20004884A JP S6177709 A JPS6177709 A JP S6177709A
- Authority
- JP
- Japan
- Prior art keywords
- data
- contrast
- surface roughness
- measured
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003746 surface roughness Effects 0.000 title claims abstract description 25
- 238000005259 measurement Methods 0.000 claims abstract description 27
- 230000001427 coherent effect Effects 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004364 calculation method Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000004422 calculation algorithm Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000004439 roughness measurement Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- -1 ferrous metals Chemical class 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20004884A JPS6177709A (ja) | 1984-09-25 | 1984-09-25 | 表面粗さ計測装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20004884A JPS6177709A (ja) | 1984-09-25 | 1984-09-25 | 表面粗さ計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6177709A true JPS6177709A (ja) | 1986-04-21 |
| JPH0536728B2 JPH0536728B2 (OSRAM) | 1993-05-31 |
Family
ID=16417958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20004884A Granted JPS6177709A (ja) | 1984-09-25 | 1984-09-25 | 表面粗さ計測装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6177709A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0586795A1 (de) * | 1992-09-09 | 1994-03-16 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Verfahren und Vorrichtung zur berührungslosen Überprüfung der Oberflächenrauhigkeit von Materialien |
-
1984
- 1984-09-25 JP JP20004884A patent/JPS6177709A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0586795A1 (de) * | 1992-09-09 | 1994-03-16 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Verfahren und Vorrichtung zur berührungslosen Überprüfung der Oberflächenrauhigkeit von Materialien |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536728B2 (OSRAM) | 1993-05-31 |
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