JPS6177543U - - Google Patents
Info
- Publication number
- JPS6177543U JPS6177543U JP16236984U JP16236984U JPS6177543U JP S6177543 U JPS6177543 U JP S6177543U JP 16236984 U JP16236984 U JP 16236984U JP 16236984 U JP16236984 U JP 16236984U JP S6177543 U JPS6177543 U JP S6177543U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- semiconductor wafer
- configuring
- exclusively
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16236984U JPS6177543U (sv) | 1984-10-29 | 1984-10-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16236984U JPS6177543U (sv) | 1984-10-29 | 1984-10-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6177543U true JPS6177543U (sv) | 1986-05-24 |
Family
ID=30720255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16236984U Pending JPS6177543U (sv) | 1984-10-29 | 1984-10-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6177543U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003209149A (ja) * | 2001-11-02 | 2003-07-25 | Ebara Corp | 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法 |
-
1984
- 1984-10-29 JP JP16236984U patent/JPS6177543U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003209149A (ja) * | 2001-11-02 | 2003-07-25 | Ebara Corp | 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法 |