JPS61153954U - - Google Patents
Info
- Publication number
- JPS61153954U JPS61153954U JP3742385U JP3742385U JPS61153954U JP S61153954 U JPS61153954 U JP S61153954U JP 3742385 U JP3742385 U JP 3742385U JP 3742385 U JP3742385 U JP 3742385U JP S61153954 U JPS61153954 U JP S61153954U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning
- rotator
- electrical deflection
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3742385U JPS61153954U (sv) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3742385U JPS61153954U (sv) | 1985-03-18 | 1985-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61153954U true JPS61153954U (sv) | 1986-09-24 |
Family
ID=30543487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3742385U Pending JPS61153954U (sv) | 1985-03-18 | 1985-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153954U (sv) |
-
1985
- 1985-03-18 JP JP3742385U patent/JPS61153954U/ja active Pending