JPH045646U - - Google Patents
Info
- Publication number
- JPH045646U JPH045646U JP4584690U JP4584690U JPH045646U JP H045646 U JPH045646 U JP H045646U JP 4584690 U JP4584690 U JP 4584690U JP 4584690 U JP4584690 U JP 4584690U JP H045646 U JPH045646 U JP H045646U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- fixing
- suction
- semiconductor wafer
- divisions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4584690U JPH045646U (sv) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4584690U JPH045646U (sv) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045646U true JPH045646U (sv) | 1992-01-20 |
Family
ID=31560386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4584690U Pending JPH045646U (sv) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045646U (sv) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017112343A (ja) * | 2015-12-18 | 2017-06-22 | 日本特殊陶業株式会社 | 基板保持装置および基板保持方法 |
| WO2017209051A1 (ja) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | チャック、基板保持装置、パターン形成装置、及び物品の製造方法 |
| WO2021070265A1 (ja) * | 2019-10-08 | 2021-04-15 | 株式会社日立ハイテク | 試料ステージ及び光学式検査装置 |
-
1990
- 1990-04-27 JP JP4584690U patent/JPH045646U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017112343A (ja) * | 2015-12-18 | 2017-06-22 | 日本特殊陶業株式会社 | 基板保持装置および基板保持方法 |
| WO2017209051A1 (ja) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | チャック、基板保持装置、パターン形成装置、及び物品の製造方法 |
| JP2017216375A (ja) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | チャック、基板保持装置、パターン形成装置、及び物品の製造方法 |
| KR20190015414A (ko) * | 2016-06-01 | 2019-02-13 | 캐논 가부시끼가이샤 | 척, 기판 보유 지지 장치, 패턴 형성 장치, 및 물품의 제조 방법 |
| US10754262B2 (en) | 2016-06-01 | 2020-08-25 | Canon Kabushiki Kaisha | Chuck, substrate-holding apparatus, pattern-forming apparatus, and method of manufacturing article |
| WO2021070265A1 (ja) * | 2019-10-08 | 2021-04-15 | 株式会社日立ハイテク | 試料ステージ及び光学式検査装置 |
| JPWO2021070265A1 (sv) * | 2019-10-08 | 2021-04-15 |