JPS6175832U - - Google Patents

Info

Publication number
JPS6175832U
JPS6175832U JP15795984U JP15795984U JPS6175832U JP S6175832 U JPS6175832 U JP S6175832U JP 15795984 U JP15795984 U JP 15795984U JP 15795984 U JP15795984 U JP 15795984U JP S6175832 U JPS6175832 U JP S6175832U
Authority
JP
Japan
Prior art keywords
gas
vacuum container
leak valve
output side
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15795984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246432Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15795984U priority Critical patent/JPS6246432Y2/ja
Publication of JPS6175832U publication Critical patent/JPS6175832U/ja
Application granted granted Critical
Publication of JPS6246432Y2 publication Critical patent/JPS6246432Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pipeline Systems (AREA)
  • Examining Or Testing Airtightness (AREA)
JP15795984U 1984-10-19 1984-10-19 Expired JPS6246432Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15795984U JPS6246432Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15795984U JPS6246432Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6175832U true JPS6175832U (enrdf_load_stackoverflow) 1986-05-22
JPS6246432Y2 JPS6246432Y2 (enrdf_load_stackoverflow) 1987-12-15

Family

ID=30715946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15795984U Expired JPS6246432Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPS6246432Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6246432Y2 (enrdf_load_stackoverflow) 1987-12-15

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