JPS62174606U - - Google Patents

Info

Publication number
JPS62174606U
JPS62174606U JP6155686U JP6155686U JPS62174606U JP S62174606 U JPS62174606 U JP S62174606U JP 6155686 U JP6155686 U JP 6155686U JP 6155686 U JP6155686 U JP 6155686U JP S62174606 U JPS62174606 U JP S62174606U
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
liquid
way solenoid
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6155686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643451Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6155686U priority Critical patent/JPS643451Y2/ja
Publication of JPS62174606U publication Critical patent/JPS62174606U/ja
Application granted granted Critical
Publication of JPS643451Y2 publication Critical patent/JPS643451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP6155686U 1986-04-22 1986-04-22 Expired JPS643451Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6155686U JPS643451Y2 (enrdf_load_stackoverflow) 1986-04-22 1986-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6155686U JPS643451Y2 (enrdf_load_stackoverflow) 1986-04-22 1986-04-22

Publications (2)

Publication Number Publication Date
JPS62174606U true JPS62174606U (enrdf_load_stackoverflow) 1987-11-06
JPS643451Y2 JPS643451Y2 (enrdf_load_stackoverflow) 1989-01-30

Family

ID=30895002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6155686U Expired JPS643451Y2 (enrdf_load_stackoverflow) 1986-04-22 1986-04-22

Country Status (1)

Country Link
JP (1) JPS643451Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS643451Y2 (enrdf_load_stackoverflow) 1989-01-30

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