JPS6168900A - プラズマト−チの着火方法 - Google Patents

プラズマト−チの着火方法

Info

Publication number
JPS6168900A
JPS6168900A JP10442084A JP10442084A JPS6168900A JP S6168900 A JPS6168900 A JP S6168900A JP 10442084 A JP10442084 A JP 10442084A JP 10442084 A JP10442084 A JP 10442084A JP S6168900 A JPS6168900 A JP S6168900A
Authority
JP
Japan
Prior art keywords
tube
end surface
core gas
plasma torch
open end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10442084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510800B2 (enrdf_load_stackoverflow
Inventor
小泉　忠司
岩田　敬
横田　誠二
好明 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neturen Co Ltd
Original Assignee
Neturen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neturen Co Ltd filed Critical Neturen Co Ltd
Priority to JP10442084A priority Critical patent/JPS6168900A/ja
Publication of JPS6168900A publication Critical patent/JPS6168900A/ja
Publication of JPH0510800B2 publication Critical patent/JPH0510800B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Plasma Technology (AREA)
JP10442084A 1984-05-25 1984-05-25 プラズマト−チの着火方法 Granted JPS6168900A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10442084A JPS6168900A (ja) 1984-05-25 1984-05-25 プラズマト−チの着火方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10442084A JPS6168900A (ja) 1984-05-25 1984-05-25 プラズマト−チの着火方法

Publications (2)

Publication Number Publication Date
JPS6168900A true JPS6168900A (ja) 1986-04-09
JPH0510800B2 JPH0510800B2 (enrdf_load_stackoverflow) 1993-02-10

Family

ID=14380198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10442084A Granted JPS6168900A (ja) 1984-05-25 1984-05-25 プラズマト−チの着火方法

Country Status (1)

Country Link
JP (1) JPS6168900A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260399A (ja) * 1989-03-31 1990-10-23 Fuji Denpa Koki Kk 高気圧プラズマアーク発生方法
JPH0523496U (ja) * 1991-09-09 1993-03-26 株式会社三社電機製作所 減圧用インダクシヨンプラズマトーチ
US9583313B2 (en) 2013-08-20 2017-02-28 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus and plasma processing method
US10147585B2 (en) 2011-10-27 2018-12-04 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260399A (ja) * 1989-03-31 1990-10-23 Fuji Denpa Koki Kk 高気圧プラズマアーク発生方法
JPH0523496U (ja) * 1991-09-09 1993-03-26 株式会社三社電機製作所 減圧用インダクシヨンプラズマトーチ
US10147585B2 (en) 2011-10-27 2018-12-04 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus
US10229814B2 (en) 2011-10-27 2019-03-12 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus
US9583313B2 (en) 2013-08-20 2017-02-28 Panasonic Intellectual Property Management Co., Ltd. Plasma processing apparatus and plasma processing method

Also Published As

Publication number Publication date
JPH0510800B2 (enrdf_load_stackoverflow) 1993-02-10

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