JPS6168387A - 化合物半導体単結晶の製造装置 - Google Patents

化合物半導体単結晶の製造装置

Info

Publication number
JPS6168387A
JPS6168387A JP19018984A JP19018984A JPS6168387A JP S6168387 A JPS6168387 A JP S6168387A JP 19018984 A JP19018984 A JP 19018984A JP 19018984 A JP19018984 A JP 19018984A JP S6168387 A JPS6168387 A JP S6168387A
Authority
JP
Japan
Prior art keywords
single crystal
crucible
compound semiconductor
sintered body
semiconductor single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19018984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214319B2 (enrdf_load_stackoverflow
Inventor
Katsutoshi Yoneya
勝利 米屋
Akihiko Tsuge
柘植　章彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19018984A priority Critical patent/JPS6168387A/ja
Publication of JPS6168387A publication Critical patent/JPS6168387A/ja
Publication of JPH0214319B2 publication Critical patent/JPH0214319B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP19018984A 1984-09-11 1984-09-11 化合物半導体単結晶の製造装置 Granted JPS6168387A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19018984A JPS6168387A (ja) 1984-09-11 1984-09-11 化合物半導体単結晶の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19018984A JPS6168387A (ja) 1984-09-11 1984-09-11 化合物半導体単結晶の製造装置

Publications (2)

Publication Number Publication Date
JPS6168387A true JPS6168387A (ja) 1986-04-08
JPH0214319B2 JPH0214319B2 (enrdf_load_stackoverflow) 1990-04-06

Family

ID=16253931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19018984A Granted JPS6168387A (ja) 1984-09-11 1984-09-11 化合物半導体単結晶の製造装置

Country Status (1)

Country Link
JP (1) JPS6168387A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0214319B2 (enrdf_load_stackoverflow) 1990-04-06

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