JPS6166348U - - Google Patents

Info

Publication number
JPS6166348U
JPS6166348U JP1984149953U JP14995384U JPS6166348U JP S6166348 U JPS6166348 U JP S6166348U JP 1984149953 U JP1984149953 U JP 1984149953U JP 14995384 U JP14995384 U JP 14995384U JP S6166348 U JPS6166348 U JP S6166348U
Authority
JP
Japan
Prior art keywords
stage
vacuum
base plate
driven
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149953U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149953U priority Critical patent/JPS6166348U/ja
Publication of JPS6166348U publication Critical patent/JPS6166348U/ja
Pending legal-status Critical Current

Links

JP1984149953U 1984-10-03 1984-10-03 Pending JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149953U JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149953U JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS6166348U true JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-07

Family

ID=30708117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149953U Pending JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6166348U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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