JPS6162841A - 分光反射率測定装置 - Google Patents
分光反射率測定装置Info
- Publication number
- JPS6162841A JPS6162841A JP59186159A JP18615984A JPS6162841A JP S6162841 A JPS6162841 A JP S6162841A JP 59186159 A JP59186159 A JP 59186159A JP 18615984 A JP18615984 A JP 18615984A JP S6162841 A JPS6162841 A JP S6162841A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- sample
- incident
- spectral reflectance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186159A JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186159A JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6162841A true JPS6162841A (ja) | 1986-03-31 |
| JPH0518053B2 JPH0518053B2 (enExample) | 1993-03-10 |
Family
ID=16183412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59186159A Granted JPS6162841A (ja) | 1984-09-04 | 1984-09-04 | 分光反射率測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162841A (enExample) |
-
1984
- 1984-09-04 JP JP59186159A patent/JPS6162841A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518053B2 (enExample) | 1993-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7411685B2 (en) | Spectrometric measuring instrument | |
| US5963327A (en) | Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems | |
| US4081215A (en) | Stable two-channel, single-filter spectrometer | |
| KR102696735B1 (ko) | 순시 엘립소미터 또는 스케터로미터 및 이와 관련된 측정 방법 | |
| US4332476A (en) | Method and apparatus for studying surface properties | |
| US5255075A (en) | Optical sensor | |
| US9841376B2 (en) | High sensitivity metamaterial nano-sensing system with ultra-narrow line width spectral response | |
| JPS6381226A (ja) | スペクトル分析方法及び装置 | |
| US5526117A (en) | Method for the determination of characteristic values of transparent layers with the aid of ellipsometry | |
| JPS6329210B2 (enExample) | ||
| JP4399126B2 (ja) | 分光エリプソメータ | |
| JPH05302816A (ja) | 半導体膜厚測定装置 | |
| CN108458787A (zh) | 中阶梯光栅型空间外差拉曼光谱仪光路结构 | |
| US4165937A (en) | Magneto-optic spectrophotometer | |
| JPS6017340A (ja) | 紙の光学的な特性を測定する装置 | |
| JPS6162841A (ja) | 分光反射率測定装置 | |
| JPH08271337A (ja) | 分光器 | |
| KR102016452B1 (ko) | 타원해석기 | |
| JPH11101739A (ja) | エリプソメトリ装置 | |
| JPH05149708A (ja) | 二光束干渉計の基準位置決め方法及び装置 | |
| JPS6179109A (ja) | 反射型ガラス歪検査装置 | |
| JPS62289749A (ja) | 反射率測定装置 | |
| JPS6244215B2 (enExample) | ||
| JP3273878B2 (ja) | 多重反射型高感度反射測定装置 | |
| US2435175A (en) | Flickering beam spectrophotometer for the measurement of bronze |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |