JPS6161934B2 - - Google Patents

Info

Publication number
JPS6161934B2
JPS6161934B2 JP15260381A JP15260381A JPS6161934B2 JP S6161934 B2 JPS6161934 B2 JP S6161934B2 JP 15260381 A JP15260381 A JP 15260381A JP 15260381 A JP15260381 A JP 15260381A JP S6161934 B2 JPS6161934 B2 JP S6161934B2
Authority
JP
Japan
Prior art keywords
stage
positioning
guide member
suction
driving force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15260381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5856741A (ja
Inventor
Munenori Kanai
Hiroo Kinoshita
Kimikichi Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15260381A priority Critical patent/JPS5856741A/ja
Publication of JPS5856741A publication Critical patent/JPS5856741A/ja
Publication of JPS6161934B2 publication Critical patent/JPS6161934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
JP15260381A 1981-09-27 1981-09-27 ステ−ジの送り位置決め装置 Granted JPS5856741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15260381A JPS5856741A (ja) 1981-09-27 1981-09-27 ステ−ジの送り位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15260381A JPS5856741A (ja) 1981-09-27 1981-09-27 ステ−ジの送り位置決め装置

Publications (2)

Publication Number Publication Date
JPS5856741A JPS5856741A (ja) 1983-04-04
JPS6161934B2 true JPS6161934B2 (enExample) 1986-12-27

Family

ID=15544012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15260381A Granted JPS5856741A (ja) 1981-09-27 1981-09-27 ステ−ジの送り位置決め装置

Country Status (1)

Country Link
JP (1) JPS5856741A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609621A (ja) * 1983-06-28 1985-01-18 Miyoutoku:Kk エア−スライド及び静止用支持台
JPS6076943A (ja) * 1983-09-30 1985-05-01 Miyoutoku:Kk 送り装置
US5354353A (en) * 1993-10-28 1994-10-11 Special Metals Corporation Amalgamable composition and method of production
US5490870A (en) * 1993-10-28 1996-02-13 Special Metals Corporation Amalgamable composition and method of production
US6127749A (en) 1999-02-10 2000-10-03 Nikon Corporation Of Japan Two-dimensional electric motor

Also Published As

Publication number Publication date
JPS5856741A (ja) 1983-04-04

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