JPS6161484A - 発光素子の製造方法 - Google Patents
発光素子の製造方法Info
- Publication number
- JPS6161484A JPS6161484A JP59183482A JP18348284A JPS6161484A JP S6161484 A JPS6161484 A JP S6161484A JP 59183482 A JP59183482 A JP 59183482A JP 18348284 A JP18348284 A JP 18348284A JP S6161484 A JPS6161484 A JP S6161484A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cladding layer
- current
- thickness
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 230000000903 blocking effect Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000007791 liquid phase Substances 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 238000005253 cladding Methods 0.000 claims description 48
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 21
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 10
- 230000010355 oscillation Effects 0.000 abstract description 12
- 239000013078 crystal Substances 0.000 abstract description 9
- 125000005842 heteroatom Chemical group 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 13
- 239000000155 melt Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183482A JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183482A JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161484A true JPS6161484A (ja) | 1986-03-29 |
| JPH0260077B2 JPH0260077B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-14 |
Family
ID=16136580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59183482A Granted JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161484A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ302966B6 (cs) * | 1999-03-18 | 2012-01-25 | Ppg Industries Ohio, Inc. | Povlak na substrátu a predmet s povlakem |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830186A (ja) * | 1981-08-18 | 1983-02-22 | Toshiba Corp | 光半導体素子及びその製造方法 |
| JPS5861695A (ja) * | 1981-10-09 | 1983-04-12 | Hitachi Ltd | 半導体レ−ザ素子 |
-
1984
- 1984-09-01 JP JP59183482A patent/JPS6161484A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830186A (ja) * | 1981-08-18 | 1983-02-22 | Toshiba Corp | 光半導体素子及びその製造方法 |
| JPS5861695A (ja) * | 1981-10-09 | 1983-04-12 | Hitachi Ltd | 半導体レ−ザ素子 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ302966B6 (cs) * | 1999-03-18 | 2012-01-25 | Ppg Industries Ohio, Inc. | Povlak na substrátu a predmet s povlakem |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260077B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-14 |