JPS6160576B2 - - Google Patents

Info

Publication number
JPS6160576B2
JPS6160576B2 JP52033081A JP3308177A JPS6160576B2 JP S6160576 B2 JPS6160576 B2 JP S6160576B2 JP 52033081 A JP52033081 A JP 52033081A JP 3308177 A JP3308177 A JP 3308177A JP S6160576 B2 JPS6160576 B2 JP S6160576B2
Authority
JP
Japan
Prior art keywords
semiconductor
waveguide
open end
measuring
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52033081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53118373A (en
Inventor
Akira Usami
Ikuzo Kondo
Kaoru Kato
Shinichi Kamidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP3308177A priority Critical patent/JPS53118373A/ja
Publication of JPS53118373A publication Critical patent/JPS53118373A/ja
Publication of JPS6160576B2 publication Critical patent/JPS6160576B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3308177A 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave Granted JPS53118373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3308177A JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3308177A JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Publications (2)

Publication Number Publication Date
JPS53118373A JPS53118373A (en) 1978-10-16
JPS6160576B2 true JPS6160576B2 (en, 2012) 1986-12-22

Family

ID=12376739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3308177A Granted JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Country Status (1)

Country Link
JP (1) JPS53118373A (en, 2012)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961039A (ja) * 1982-09-30 1984-04-07 Nippon Telegr & Teleph Corp <Ntt> 半導体基板結晶品質検査方法
JPS61114543A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体評価装置
US4777146A (en) * 1987-02-24 1988-10-11 American Telephone And Telegraph Company, At&T Bell Laboratories Fabrication process involving semi-insulating material
JPH07105427B2 (ja) * 1992-10-19 1995-11-13 学校法人幾徳学園 半導体材料のライフタイム評価方法とその装置
CA2416165A1 (en) * 2000-07-14 2002-01-24 Midwest Research Institute Radio frequency coupling apparatus and method for measuring minority carrier lifetimes in semiconductor materials
JP4265206B2 (ja) * 2002-11-27 2009-05-20 株式会社 東北テクノアーチ 非接触導電率測定システム
JP6219559B2 (ja) * 2012-09-07 2017-10-25 株式会社神戸製鋼所 半導体キャリア寿命測定装置および該方法

Also Published As

Publication number Publication date
JPS53118373A (en) 1978-10-16

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