JPS53118373A - Method of measuring characteristic of semiconductor by microwave - Google Patents

Method of measuring characteristic of semiconductor by microwave

Info

Publication number
JPS53118373A
JPS53118373A JP3308177A JP3308177A JPS53118373A JP S53118373 A JPS53118373 A JP S53118373A JP 3308177 A JP3308177 A JP 3308177A JP 3308177 A JP3308177 A JP 3308177A JP S53118373 A JPS53118373 A JP S53118373A
Authority
JP
Japan
Prior art keywords
microwave
semiconductor
measuring characteristic
characteristic
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3308177A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6160576B2 (en, 2012
Inventor
Akira Usami
Ikuzou Kondou
Kaoru Katou
Shinichi Kamidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP3308177A priority Critical patent/JPS53118373A/ja
Publication of JPS53118373A publication Critical patent/JPS53118373A/ja
Publication of JPS6160576B2 publication Critical patent/JPS6160576B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3308177A 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave Granted JPS53118373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3308177A JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3308177A JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Publications (2)

Publication Number Publication Date
JPS53118373A true JPS53118373A (en) 1978-10-16
JPS6160576B2 JPS6160576B2 (en, 2012) 1986-12-22

Family

ID=12376739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3308177A Granted JPS53118373A (en) 1977-03-25 1977-03-25 Method of measuring characteristic of semiconductor by microwave

Country Status (1)

Country Link
JP (1) JPS53118373A (en, 2012)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961039A (ja) * 1982-09-30 1984-04-07 Nippon Telegr & Teleph Corp <Ntt> 半導体基板結晶品質検査方法
JPS61114543A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体評価装置
JPH02181458A (ja) * 1987-02-24 1990-07-16 American Teleph & Telegr Co <Att> 半絶縁材料よりなる基体を製造する方法
JPH06132373A (ja) * 1992-10-19 1994-05-13 Ikutoku Gakuen 半導体材料のライフタイム評価方法とその装置
WO2002006800A3 (en) * 2000-07-14 2002-10-17 Midwest Research Inst Radio frequency coupling apparatus and method for measuring minority carrier lifetimes in semiconductor materials
JP2004177274A (ja) * 2002-11-27 2004-06-24 Tohoku Techno Arch Co Ltd 非接触導電率測定システム
JP2014053470A (ja) * 2012-09-07 2014-03-20 Kobe Steel Ltd 半導体キャリア寿命測定装置および該方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961039A (ja) * 1982-09-30 1984-04-07 Nippon Telegr & Teleph Corp <Ntt> 半導体基板結晶品質検査方法
JPS61114543A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体評価装置
JPH02181458A (ja) * 1987-02-24 1990-07-16 American Teleph & Telegr Co <Att> 半絶縁材料よりなる基体を製造する方法
JPH06132373A (ja) * 1992-10-19 1994-05-13 Ikutoku Gakuen 半導体材料のライフタイム評価方法とその装置
WO2002006800A3 (en) * 2000-07-14 2002-10-17 Midwest Research Inst Radio frequency coupling apparatus and method for measuring minority carrier lifetimes in semiconductor materials
JP2004177274A (ja) * 2002-11-27 2004-06-24 Tohoku Techno Arch Co Ltd 非接触導電率測定システム
JP2014053470A (ja) * 2012-09-07 2014-03-20 Kobe Steel Ltd 半導体キャリア寿命測定装置および該方法

Also Published As

Publication number Publication date
JPS6160576B2 (en, 2012) 1986-12-22

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