JPS6160401B2 - - Google Patents
Info
- Publication number
- JPS6160401B2 JPS6160401B2 JP57001640A JP164082A JPS6160401B2 JP S6160401 B2 JPS6160401 B2 JP S6160401B2 JP 57001640 A JP57001640 A JP 57001640A JP 164082 A JP164082 A JP 164082A JP S6160401 B2 JPS6160401 B2 JP S6160401B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- optical waveguide
- diffusion
- manufacturing
- tapered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 25
- 238000009792 diffusion process Methods 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 229910021645 metal ion Inorganic materials 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- -1 Silver ions Chemical class 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 101710134784 Agnoprotein Proteins 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57001640A JPS58118610A (ja) | 1982-01-08 | 1982-01-08 | テ−パ状光導波路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57001640A JPS58118610A (ja) | 1982-01-08 | 1982-01-08 | テ−パ状光導波路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58118610A JPS58118610A (ja) | 1983-07-14 |
| JPS6160401B2 true JPS6160401B2 (enrdf_load_stackoverflow) | 1986-12-20 |
Family
ID=11507118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57001640A Granted JPS58118610A (ja) | 1982-01-08 | 1982-01-08 | テ−パ状光導波路の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58118610A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273012U (enrdf_load_stackoverflow) * | 1988-11-25 | 1990-06-04 | ||
| WO2020255369A1 (ja) * | 2019-06-21 | 2020-12-24 | 株式会社テクノシステム | 自給型ビルシステム及び自給型ビルシステム用のインフラ整備装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60237405A (ja) * | 1984-05-09 | 1985-11-26 | Nippon Sheet Glass Co Ltd | イオン交換による光学素子の製造方法 |
| CA1323194C (en) * | 1987-07-28 | 1993-10-19 | Amaresh Mahapatra | Process for tapering waveguides |
| JP2586572B2 (ja) * | 1988-05-09 | 1997-03-05 | ブラザー工業株式会社 | 屈折率分布光カプラ及びその作製法 |
| FI82989C (fi) * | 1989-04-13 | 1991-05-10 | Nokia Oy Ab | Foerfarande foer framstaellning av en ljusvaogledare. |
| KR20070091288A (ko) | 2004-11-17 | 2007-09-10 | 컬러 칩 (이스라엘) 리미티드. | 도파로 테이퍼링 및 최적화된 도파로 구조물 형성의프로세스 및 방법 |
-
1982
- 1982-01-08 JP JP57001640A patent/JPS58118610A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273012U (enrdf_load_stackoverflow) * | 1988-11-25 | 1990-06-04 | ||
| WO2020255369A1 (ja) * | 2019-06-21 | 2020-12-24 | 株式会社テクノシステム | 自給型ビルシステム及び自給型ビルシステム用のインフラ整備装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58118610A (ja) | 1983-07-14 |
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