JPS6160331B2 - - Google Patents
Info
- Publication number
- JPS6160331B2 JPS6160331B2 JP51093961A JP9396176A JPS6160331B2 JP S6160331 B2 JPS6160331 B2 JP S6160331B2 JP 51093961 A JP51093961 A JP 51093961A JP 9396176 A JP9396176 A JP 9396176A JP S6160331 B2 JPS6160331 B2 JP S6160331B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- air chamber
- temperature
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003303 reheating Methods 0.000 description 8
- 238000001816 cooling Methods 0.000 description 6
- 230000001143 conditioned effect Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009417 prefabrication Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9396176A JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9396176A JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319661A JPS5319661A (en) | 1978-02-23 |
JPS6160331B2 true JPS6160331B2 (ko) | 1986-12-20 |
Family
ID=14096994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9396176A Granted JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5319661A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230014569A (ko) * | 2021-07-21 | 2023-01-30 | 한국전력공사 | 배열 회수 보일러의 핀 튜브 검사장치 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
KR960007979B1 (ko) * | 1991-04-17 | 1996-06-17 | 마쯔시다덴기산교 가부시기가이샤 | 클리인공간시스템 |
FR2878315B1 (fr) * | 2004-11-19 | 2007-06-01 | Matal Sa | Installation pour menager une zone de travail sous atmosphere controlee au sein d'un local |
-
1976
- 1976-08-09 JP JP9396176A patent/JPS5319661A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230014569A (ko) * | 2021-07-21 | 2023-01-30 | 한국전력공사 | 배열 회수 보일러의 핀 튜브 검사장치 |
Also Published As
Publication number | Publication date |
---|---|
JPS5319661A (en) | 1978-02-23 |
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