JPS5319661A - Air conditioner in clean room - Google Patents

Air conditioner in clean room

Info

Publication number
JPS5319661A
JPS5319661A JP9396176A JP9396176A JPS5319661A JP S5319661 A JPS5319661 A JP S5319661A JP 9396176 A JP9396176 A JP 9396176A JP 9396176 A JP9396176 A JP 9396176A JP S5319661 A JPS5319661 A JP S5319661A
Authority
JP
Japan
Prior art keywords
clean room
air conditioner
air
recycling
exeedingly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9396176A
Other languages
Japanese (ja)
Other versions
JPS6160331B2 (en
Inventor
Akira Kawamura
Hitoshi Honjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP9396176A priority Critical patent/JPS5319661A/en
Publication of JPS5319661A publication Critical patent/JPS5319661A/en
Publication of JPS6160331B2 publication Critical patent/JPS6160331B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Central Air Conditioning (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To make microtemperature control possible and to facilitate maintenance of an exeedingly constant temperature of a clean room, by providing an air conditioner in a main stream of recycling air produced by a recycling blower, and by conditioning only a part of the recirculation air.
JP9396176A 1976-08-09 1976-08-09 Air conditioner in clean room Granted JPS5319661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9396176A JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9396176A JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Publications (2)

Publication Number Publication Date
JPS5319661A true JPS5319661A (en) 1978-02-23
JPS6160331B2 JPS6160331B2 (en) 1986-12-20

Family

ID=14096994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9396176A Granted JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Country Status (1)

Country Link
JP (1) JPS5319661A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
US5562539A (en) * 1991-04-17 1996-10-08 Matsushita Electric Industrial Co., Ltd. Clean space system
FR2878315A1 (en) * 2004-11-19 2006-05-26 Matal Sa Air treating installation for e.g. agri-food industry, has case with mixing chambers comprising new air inlet permitting to deconcentrate air of ambient environment of location and recycled air inlet

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102530646B1 (en) * 2021-07-21 2023-05-09 한국전력공사 Fin tube inspection device of heat recovery steam generator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
US5562539A (en) * 1991-04-17 1996-10-08 Matsushita Electric Industrial Co., Ltd. Clean space system
FR2878315A1 (en) * 2004-11-19 2006-05-26 Matal Sa Air treating installation for e.g. agri-food industry, has case with mixing chambers comprising new air inlet permitting to deconcentrate air of ambient environment of location and recycled air inlet

Also Published As

Publication number Publication date
JPS6160331B2 (en) 1986-12-20

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