JPS6160331B2 - - Google Patents

Info

Publication number
JPS6160331B2
JPS6160331B2 JP51093961A JP9396176A JPS6160331B2 JP S6160331 B2 JPS6160331 B2 JP S6160331B2 JP 51093961 A JP51093961 A JP 51093961A JP 9396176 A JP9396176 A JP 9396176A JP S6160331 B2 JPS6160331 B2 JP S6160331B2
Authority
JP
Japan
Prior art keywords
air
clean room
air chamber
temperature
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51093961A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5319661A (en
Inventor
Akira Kawamura
Hitoshi Pponjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP9396176A priority Critical patent/JPS5319661A/ja
Publication of JPS5319661A publication Critical patent/JPS5319661A/ja
Publication of JPS6160331B2 publication Critical patent/JPS6160331B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
JP9396176A 1976-08-09 1976-08-09 Air conditioner in clean room Granted JPS5319661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9396176A JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9396176A JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Publications (2)

Publication Number Publication Date
JPS5319661A JPS5319661A (en) 1978-02-23
JPS6160331B2 true JPS6160331B2 (ar) 1986-12-20

Family

ID=14096994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9396176A Granted JPS5319661A (en) 1976-08-09 1976-08-09 Air conditioner in clean room

Country Status (1)

Country Link
JP (1) JPS5319661A (ar)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230014569A (ko) * 2021-07-21 2023-01-30 한국전력공사 배열 회수 보일러의 핀 튜브 검사장치

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795536A (en) * 1980-12-05 1982-06-14 Takasago Thermal Eng Co Lts Apparatus for preparing work environment for manufacturing integrated circuits or the like
KR960007979B1 (ko) * 1991-04-17 1996-06-17 마쯔시다덴기산교 가부시기가이샤 클리인공간시스템
FR2878315B1 (fr) * 2004-11-19 2007-06-01 Matal Sa Installation pour menager une zone de travail sous atmosphere controlee au sein d'un local

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230014569A (ko) * 2021-07-21 2023-01-30 한국전력공사 배열 회수 보일러의 핀 튜브 검사장치

Also Published As

Publication number Publication date
JPS5319661A (en) 1978-02-23

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