JPS6159131A - エアシャワー装置 - Google Patents
エアシャワー装置Info
- Publication number
- JPS6159131A JPS6159131A JP59180202A JP18020284A JPS6159131A JP S6159131 A JPS6159131 A JP S6159131A JP 59180202 A JP59180202 A JP 59180202A JP 18020284 A JP18020284 A JP 18020284A JP S6159131 A JPS6159131 A JP S6159131A
- Authority
- JP
- Japan
- Prior art keywords
- air
- compartment
- room
- jet
- laminar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007921 spray Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 abstract description 11
- 238000011045 prefiltration Methods 0.000 abstract description 6
- 238000007599 discharging Methods 0.000 abstract 1
- 238000009423 ventilation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 241001070941 Castanea Species 0.000 description 1
- 235000014036 Castanea Nutrition 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
- F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180202A JPS6159131A (ja) | 1984-08-28 | 1984-08-28 | エアシャワー装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180202A JPS6159131A (ja) | 1984-08-28 | 1984-08-28 | エアシャワー装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159131A true JPS6159131A (ja) | 1986-03-26 |
| JPH0425452B2 JPH0425452B2 (forum.php) | 1992-04-30 |
Family
ID=16079181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59180202A Granted JPS6159131A (ja) | 1984-08-28 | 1984-08-28 | エアシャワー装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159131A (forum.php) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62127437U (forum.php) * | 1986-02-05 | 1987-08-12 | ||
| JPS63161335A (ja) * | 1986-12-23 | 1988-07-05 | Hitachi Plant Eng & Constr Co Ltd | 空気清浄室 |
| US5692954A (en) * | 1994-05-09 | 1997-12-02 | Samsung Electronics Co., Ltd. | Air-shower system for a clean room |
| US8217339B2 (en) | 2005-03-14 | 2012-07-10 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering method |
| JP2013167387A (ja) * | 2012-02-15 | 2013-08-29 | Hitachi Industrial Equipment Systems Co Ltd | エアシャワー装置 |
| FR2990143A1 (fr) * | 2012-05-07 | 2013-11-08 | Paul Brunon | Buse de soufflage a jets multiples |
| JP2014031993A (ja) * | 2012-08-06 | 2014-02-20 | Shinryo Corp | ナノマテリアル取扱施設用エアシャワー室及びナノマテリアルの取扱施設 |
| CN109127586A (zh) * | 2018-10-12 | 2019-01-04 | 安徽优诺净化科技有限公司 | 一种风淋室 |
| CN113757797A (zh) * | 2020-06-05 | 2021-12-07 | 株式会社希力卡·装备Nq | 空气调节装置及空气调节管理方法 |
-
1984
- 1984-08-28 JP JP59180202A patent/JPS6159131A/ja active Granted
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62127437U (forum.php) * | 1986-02-05 | 1987-08-12 | ||
| JPS63161335A (ja) * | 1986-12-23 | 1988-07-05 | Hitachi Plant Eng & Constr Co Ltd | 空気清浄室 |
| US5692954A (en) * | 1994-05-09 | 1997-12-02 | Samsung Electronics Co., Ltd. | Air-shower system for a clean room |
| US8217339B2 (en) | 2005-03-14 | 2012-07-10 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering method |
| US8586916B2 (en) | 2005-03-14 | 2013-11-19 | Hitachi, Ltd. | Adhering matter inspection equipment and method for inspecting adhering matter |
| JP2013167387A (ja) * | 2012-02-15 | 2013-08-29 | Hitachi Industrial Equipment Systems Co Ltd | エアシャワー装置 |
| FR2990143A1 (fr) * | 2012-05-07 | 2013-11-08 | Paul Brunon | Buse de soufflage a jets multiples |
| JP2014031993A (ja) * | 2012-08-06 | 2014-02-20 | Shinryo Corp | ナノマテリアル取扱施設用エアシャワー室及びナノマテリアルの取扱施設 |
| CN109127586A (zh) * | 2018-10-12 | 2019-01-04 | 安徽优诺净化科技有限公司 | 一种风淋室 |
| CN113757797A (zh) * | 2020-06-05 | 2021-12-07 | 株式会社希力卡·装备Nq | 空气调节装置及空气调节管理方法 |
| KR20210151652A (ko) * | 2020-06-05 | 2021-12-14 | 가부시키가이샤 싱카아웃핏Nq | 공조 장치 및 공조 관리 방법 |
| CN113757797B (zh) * | 2020-06-05 | 2023-04-18 | 株式会社新科集团 | 空气调节装置及空气调节管理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425452B2 (forum.php) | 1992-04-30 |
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