JPS6157626B2 - - Google Patents

Info

Publication number
JPS6157626B2
JPS6157626B2 JP15520280A JP15520280A JPS6157626B2 JP S6157626 B2 JPS6157626 B2 JP S6157626B2 JP 15520280 A JP15520280 A JP 15520280A JP 15520280 A JP15520280 A JP 15520280A JP S6157626 B2 JPS6157626 B2 JP S6157626B2
Authority
JP
Japan
Prior art keywords
mask
brush
cassette
cleaning
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15520280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5779619A (en
Inventor
Takeshi Yoshizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15520280A priority Critical patent/JPS5779619A/ja
Publication of JPS5779619A publication Critical patent/JPS5779619A/ja
Publication of JPS6157626B2 publication Critical patent/JPS6157626B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP15520280A 1980-11-06 1980-11-06 Mask cleansing device Granted JPS5779619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15520280A JPS5779619A (en) 1980-11-06 1980-11-06 Mask cleansing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15520280A JPS5779619A (en) 1980-11-06 1980-11-06 Mask cleansing device

Publications (2)

Publication Number Publication Date
JPS5779619A JPS5779619A (en) 1982-05-18
JPS6157626B2 true JPS6157626B2 (enExample) 1986-12-08

Family

ID=15600723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15520280A Granted JPS5779619A (en) 1980-11-06 1980-11-06 Mask cleansing device

Country Status (1)

Country Link
JP (1) JPS5779619A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195653A (ja) * 1983-04-21 1984-11-06 Nec Corp フオトマスクの洗浄方法および洗浄装置
JPS6014244A (ja) * 1983-07-06 1985-01-24 Fujitsu Ltd マスク洗浄装置
US4715392A (en) * 1983-11-10 1987-12-29 Nippon Kogaku K. K. Automatic photomask or reticle washing and cleaning system
JPS60103349A (ja) * 1983-11-10 1985-06-07 Nippon Kogaku Kk <Nikon> 基板の洗浄装置
JPS6143430A (ja) * 1984-08-07 1986-03-03 Mitsubishi Electric Corp カセツト洗浄装置
JPH0695508B2 (ja) * 1986-11-28 1994-11-24 大日本スクリ−ン製造株式会社 基板の両面洗浄装置
JP2613901B2 (ja) * 1987-12-17 1997-05-28 九州日本電気株式会社 縮小投影型露光装置

Also Published As

Publication number Publication date
JPS5779619A (en) 1982-05-18

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