JPS6156426A - 電子ビ−ム装置 - Google Patents

電子ビ−ム装置

Info

Publication number
JPS6156426A
JPS6156426A JP59156640A JP15664084A JPS6156426A JP S6156426 A JPS6156426 A JP S6156426A JP 59156640 A JP59156640 A JP 59156640A JP 15664084 A JP15664084 A JP 15664084A JP S6156426 A JPS6156426 A JP S6156426A
Authority
JP
Japan
Prior art keywords
electron beam
circuit
signal
voltage distribution
image data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59156640A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354857B2 (enrdf_load_stackoverflow
Inventor
Kazuyuki Ozaki
一幸 尾崎
Yoshiaki Goto
後藤　善朗
Akio Ito
昭夫 伊藤
Toshihiro Ishizuka
俊弘 石塚
Kazuo Okubo
大窪　和生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59156640A priority Critical patent/JPS6156426A/ja
Publication of JPS6156426A publication Critical patent/JPS6156426A/ja
Publication of JPH0354857B2 publication Critical patent/JPH0354857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59156640A 1984-07-27 1984-07-27 電子ビ−ム装置 Granted JPS6156426A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59156640A JPS6156426A (ja) 1984-07-27 1984-07-27 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59156640A JPS6156426A (ja) 1984-07-27 1984-07-27 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS6156426A true JPS6156426A (ja) 1986-03-22
JPH0354857B2 JPH0354857B2 (enrdf_load_stackoverflow) 1991-08-21

Family

ID=15632081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59156640A Granted JPS6156426A (ja) 1984-07-27 1984-07-27 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS6156426A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63118381U (enrdf_load_stackoverflow) * 1987-01-26 1988-07-30

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871540A (ja) * 1981-09-30 1983-04-28 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング 電子線測定法による電位決定のための走査方法
JPS58197643A (ja) * 1982-05-12 1983-11-17 Toshiba Corp ストロボ走査電子顕微鏡装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871540A (ja) * 1981-09-30 1983-04-28 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング 電子線測定法による電位決定のための走査方法
JPS58197643A (ja) * 1982-05-12 1983-11-17 Toshiba Corp ストロボ走査電子顕微鏡装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63118381U (enrdf_load_stackoverflow) * 1987-01-26 1988-07-30

Also Published As

Publication number Publication date
JPH0354857B2 (enrdf_load_stackoverflow) 1991-08-21

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