JPS6155776B2 - - Google Patents

Info

Publication number
JPS6155776B2
JPS6155776B2 JP8681077A JP8681077A JPS6155776B2 JP S6155776 B2 JPS6155776 B2 JP S6155776B2 JP 8681077 A JP8681077 A JP 8681077A JP 8681077 A JP8681077 A JP 8681077A JP S6155776 B2 JPS6155776 B2 JP S6155776B2
Authority
JP
Japan
Prior art keywords
silicon oxide
oxide film
hole
metal wiring
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8681077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5421289A (en
Inventor
Sunao Nishioka
Shinichi Sato
Hisao Yakushiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8681077A priority Critical patent/JPS5421289A/ja
Publication of JPS5421289A publication Critical patent/JPS5421289A/ja
Publication of JPS6155776B2 publication Critical patent/JPS6155776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP8681077A 1977-07-19 1977-07-19 Manufacture for semiconductor device Granted JPS5421289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8681077A JPS5421289A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8681077A JPS5421289A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5421289A JPS5421289A (en) 1979-02-17
JPS6155776B2 true JPS6155776B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-29

Family

ID=13897158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8681077A Granted JPS5421289A (en) 1977-07-19 1977-07-19 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5421289A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142642A (en) * 1980-04-07 1981-11-07 Fujitsu Ltd Manufacture of semiconductor device
JPS59141232A (ja) * 1983-02-02 1984-08-13 Seiko Instr & Electronics Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5421289A (en) 1979-02-17

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