JPS6155766B2 - - Google Patents
Info
- Publication number
- JPS6155766B2 JPS6155766B2 JP11398179A JP11398179A JPS6155766B2 JP S6155766 B2 JPS6155766 B2 JP S6155766B2 JP 11398179 A JP11398179 A JP 11398179A JP 11398179 A JP11398179 A JP 11398179A JP S6155766 B2 JPS6155766 B2 JP S6155766B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- pieces
- susceptor
- support plate
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910021383 artificial graphite Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11398179A JPS5637297A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11398179A JPS5637297A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5637297A JPS5637297A (en) | 1981-04-10 |
| JPS6155766B2 true JPS6155766B2 (zh) | 1986-11-29 |
Family
ID=14626058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11398179A Granted JPS5637297A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5637297A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4496828A (en) * | 1983-07-08 | 1985-01-29 | Ultra Carbon Corporation | Susceptor assembly |
| JP2652759B2 (ja) * | 1993-09-03 | 1997-09-10 | コマツ電子金属株式会社 | 気相成長装置用バレル型サセプタのウエハポケット |
| JP2007242648A (ja) * | 2006-03-04 | 2007-09-20 | Masato Toshima | 基板の処理装置 |
-
1979
- 1979-09-05 JP JP11398179A patent/JPS5637297A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5637297A (en) | 1981-04-10 |
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