JPS6154210U - - Google Patents

Info

Publication number
JPS6154210U
JPS6154210U JP14022484U JP14022484U JPS6154210U JP S6154210 U JPS6154210 U JP S6154210U JP 14022484 U JP14022484 U JP 14022484U JP 14022484 U JP14022484 U JP 14022484U JP S6154210 U JPS6154210 U JP S6154210U
Authority
JP
Japan
Prior art keywords
stage
sensor
fixed probe
board
probe board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14022484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345125Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14022484U priority Critical patent/JPH0345125Y2/ja
Publication of JPS6154210U publication Critical patent/JPS6154210U/ja
Application granted granted Critical
Publication of JPH0345125Y2 publication Critical patent/JPH0345125Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14022484U 1984-09-14 1984-09-14 Expired JPH0345125Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14022484U JPH0345125Y2 (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14022484U JPH0345125Y2 (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Publications (2)

Publication Number Publication Date
JPS6154210U true JPS6154210U (enrdf_load_stackoverflow) 1986-04-11
JPH0345125Y2 JPH0345125Y2 (enrdf_load_stackoverflow) 1991-09-24

Family

ID=30698580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14022484U Expired JPH0345125Y2 (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Country Status (1)

Country Link
JP (1) JPH0345125Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040747A (ja) * 2005-08-01 2007-02-15 Micronics Japan Co Ltd 表示パネルの電気検査装置
JP2012047459A (ja) * 2010-08-24 2012-03-08 Micronics Japan Co Ltd 平板状被検査体の検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6050799B2 (ja) * 2014-10-20 2016-12-21 中央精機株式会社 ステージ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040747A (ja) * 2005-08-01 2007-02-15 Micronics Japan Co Ltd 表示パネルの電気検査装置
JP2012047459A (ja) * 2010-08-24 2012-03-08 Micronics Japan Co Ltd 平板状被検査体の検査装置

Also Published As

Publication number Publication date
JPH0345125Y2 (enrdf_load_stackoverflow) 1991-09-24

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