JPS61149338U - - Google Patents

Info

Publication number
JPS61149338U
JPS61149338U JP3250485U JP3250485U JPS61149338U JP S61149338 U JPS61149338 U JP S61149338U JP 3250485 U JP3250485 U JP 3250485U JP 3250485 U JP3250485 U JP 3250485U JP S61149338 U JPS61149338 U JP S61149338U
Authority
JP
Japan
Prior art keywords
suction surface
stage
board
probe
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3250485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3250485U priority Critical patent/JPS61149338U/ja
Publication of JPS61149338U publication Critical patent/JPS61149338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3250485U 1985-03-07 1985-03-07 Pending JPS61149338U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3250485U JPS61149338U (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3250485U JPS61149338U (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Publications (1)

Publication Number Publication Date
JPS61149338U true JPS61149338U (enrdf_load_stackoverflow) 1986-09-16

Family

ID=30534078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3250485U Pending JPS61149338U (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Country Status (1)

Country Link
JP (1) JPS61149338U (enrdf_load_stackoverflow)

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