JPS6153109A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS6153109A
JPS6153109A JP17566284A JP17566284A JPS6153109A JP S6153109 A JPS6153109 A JP S6153109A JP 17566284 A JP17566284 A JP 17566284A JP 17566284 A JP17566284 A JP 17566284A JP S6153109 A JPS6153109 A JP S6153109A
Authority
JP
Japan
Prior art keywords
silicon
reaction
hydride
diethyl ether
positive integer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17566284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328369B2 (enrdf_load_stackoverflow
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Kaoru Inoue
薫 井上
Kenji Iwata
健二 岩田
Toshiyuki Tsukahara
塚原　俊幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP17566284A priority Critical patent/JPS6153109A/ja
Publication of JPS6153109A publication Critical patent/JPS6153109A/ja
Publication of JPH0328369B2 publication Critical patent/JPH0328369B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP17566284A 1984-08-23 1984-08-23 水素化ケイ素の製造方法 Granted JPS6153109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17566284A JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17566284A JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS6153109A true JPS6153109A (ja) 1986-03-17
JPH0328369B2 JPH0328369B2 (enrdf_load_stackoverflow) 1991-04-18

Family

ID=16000023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17566284A Granted JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS6153109A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0328369B2 (enrdf_load_stackoverflow) 1991-04-18

Similar Documents

Publication Publication Date Title
US4276424A (en) Methods for the production of organic polysilanes
KR101362903B1 (ko) 아미노실란 및 이를 제조하는 방법
JPS64324B2 (enrdf_load_stackoverflow)
JP3159638B2 (ja) ３−メルカプトプロピルアルコキシシランの製造方法
CN102286016A (zh) 一种甲基氯硅烷的制备方法
CN109305985B (zh) 二甲基乙烯基氯硅烷的合成方法
JPS6153109A (ja) 水素化ケイ素の製造方法
CN112645976B (zh) 一种利用氯基CVD晶体薄膜生长制程尾气FTrPSA制备甲基氯硅烷类有机硅方法
CN112110948B (zh) 一种液态双氨基取代的乙硅烷制备方法及其产物的应用
CN109232633B (zh) 一种三甲基一甲氧基硅烷-六甲基二硅氮烷联合制备方法
CN223069100U (zh) 一种降低多晶硅中施、受主杂质的氯硅烷原料提纯系统
CN117401685B (zh) 一种同时生产高纯度三氯氢硅和四氯化硅的方法
CN117023516B (zh) 一种硼氢化锂的制备方法
CN113880875B (zh) 一种三乙基硅烷的合成方法
CN113072416B (zh) 一种制备氘代乙烯的方法
JPH0480844B2 (enrdf_load_stackoverflow)
JPH0480849B2 (enrdf_load_stackoverflow)
CN119797371A (zh) 一种二碘硅烷的制备方法
CN119285662A (zh) 一种四甲基硅烷的精馏纯化方法
JPH0480847B2 (enrdf_load_stackoverflow)
CN119306755A (zh) 一种n-甲基-n-（三甲基硅基）乙酰胺及其制备方法
JPS60255613A (ja) 水素化ケイ素の製造方法
WO2025112101A1 (zh) 提高芳香基氯硅烷还原制备芳香基硅烷转化率的制备方法
JPH034486B2 (enrdf_load_stackoverflow)
JPH01301684A (ja) 有機金属化合物の製造方法