JPS6153109A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS6153109A
JPS6153109A JP17566284A JP17566284A JPS6153109A JP S6153109 A JPS6153109 A JP S6153109A JP 17566284 A JP17566284 A JP 17566284A JP 17566284 A JP17566284 A JP 17566284A JP S6153109 A JPS6153109 A JP S6153109A
Authority
JP
Japan
Prior art keywords
silicon
reaction
hydride
diethyl ether
positive integer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17566284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328369B2 (cg-RX-API-DMAC7.html
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Kaoru Inoue
薫 井上
Kenji Iwata
健二 岩田
Toshiyuki Tsukahara
塚原　俊幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP17566284A priority Critical patent/JPS6153109A/ja
Publication of JPS6153109A publication Critical patent/JPS6153109A/ja
Publication of JPH0328369B2 publication Critical patent/JPH0328369B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP17566284A 1984-08-23 1984-08-23 水素化ケイ素の製造方法 Granted JPS6153109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17566284A JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17566284A JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS6153109A true JPS6153109A (ja) 1986-03-17
JPH0328369B2 JPH0328369B2 (cg-RX-API-DMAC7.html) 1991-04-18

Family

ID=16000023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17566284A Granted JPS6153109A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS6153109A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0328369B2 (cg-RX-API-DMAC7.html) 1991-04-18

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