JPS6150272U - - Google Patents
Info
- Publication number
- JPS6150272U JPS6150272U JP13588184U JP13588184U JPS6150272U JP S6150272 U JPS6150272 U JP S6150272U JP 13588184 U JP13588184 U JP 13588184U JP 13588184 U JP13588184 U JP 13588184U JP S6150272 U JPS6150272 U JP S6150272U
- Authority
- JP
- Japan
- Prior art keywords
- contact
- contact needle
- circuit
- utility
- test object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
- 238000005299 abrasion Methods 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は従来のＩＣ検査状態の斜視図、第２図
は第１図に示される接触針の先端部の拡大斜視図
、第３図は本考案の一実施例を示す斜視図、第４
図と第５図は第３図に示される接触針の被検査物
への接触状態側面図、第６図は本考案の他の実施
例の正面図である。
２……接触針、３……マニピユレータアーム、
４……接触針本体、５……電極、１０……インピ
ーダンス変換器。
FIG. 1 is a perspective view of a conventional IC inspection state, FIG. 2 is an enlarged perspective view of the tip of the contact needle shown in FIG. 1, FIG. 3 is a perspective view of an embodiment of the present invention, and FIG.
5 and 5 are side views of the contact needle shown in FIG. 3 in contact with the object to be inspected, and FIG. 6 is a front view of another embodiment of the present invention. 2...Contact needle, 3...Manipulator arm,
4... Contact needle body, 5... Electrode, 10... Impedance converter.
Claims (1)
触させて検査または回路切断を実行するよう構成
すると共に、前記接触針を、先端が平坦な錐台状
となつた耐摩耗誘電材料の接触針本体と、この接
触針本体の一側面に形成された電極とで構成して
、接触針の被検査物に接する傾斜角度を選択して
前記被検査物回路の切断または導通を行わせるよ
うにしたＩＣ検査装置。 ２ 電極にインピーダンス交換器を介装したこと
を特徴とする実用新案登録請求の範囲第１項記載
のＩＣ検査装置。[Claims for Utility Model Registration] 1. A manipulator is used to bring a contact needle into contact with a circuit to be tested to perform an inspection or disconnection of the circuit, and the contact needle has a truncated conical shape with a flat tip. Consisting of a contact needle body made of an abrasion dielectric material and an electrode formed on one side of the contact needle body, the inclination angle of the contact needle in contact with the test object is selected to cut or conduct the circuit of the test object. An IC inspection device that performs 2. The IC testing device according to claim 1 of the utility model registration, characterized in that an impedance exchanger is interposed in the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13588184U JPS6150272U (en) | 1984-09-06 | 1984-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13588184U JPS6150272U (en) | 1984-09-06 | 1984-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150272U true JPS6150272U (en) | 1986-04-04 |
Family
ID=30694368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13588184U Pending JPS6150272U (en) | 1984-09-06 | 1984-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150272U (en) |
-
1984
- 1984-09-06 JP JP13588184U patent/JPS6150272U/ja active Pending
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