JPS6149591B2 - - Google Patents
Info
- Publication number
- JPS6149591B2 JPS6149591B2 JP17719681A JP17719681A JPS6149591B2 JP S6149591 B2 JPS6149591 B2 JP S6149591B2 JP 17719681 A JP17719681 A JP 17719681A JP 17719681 A JP17719681 A JP 17719681A JP S6149591 B2 JPS6149591 B2 JP S6149591B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- valve
- helium
- impurities
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 12
- 239000007789 gas Substances 0.000 description 55
- 239000001307 helium Substances 0.000 description 31
- 229910052734 helium Inorganic materials 0.000 description 31
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 30
- 238000011084 recovery Methods 0.000 description 12
- 238000005057 refrigeration Methods 0.000 description 8
- 238000007599 discharging Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17719681A JPS5880470A (ja) | 1981-11-06 | 1981-11-06 | 装置系内の不純物除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17719681A JPS5880470A (ja) | 1981-11-06 | 1981-11-06 | 装置系内の不純物除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5880470A JPS5880470A (ja) | 1983-05-14 |
| JPS6149591B2 true JPS6149591B2 (US20100056889A1-20100304-C00004.png) | 1986-10-30 |
Family
ID=16026853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17719681A Granted JPS5880470A (ja) | 1981-11-06 | 1981-11-06 | 装置系内の不純物除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5880470A (US20100056889A1-20100304-C00004.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63136494U (US20100056889A1-20100304-C00004.png) * | 1987-02-27 | 1988-09-07 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0721358B2 (ja) * | 1987-01-30 | 1995-03-08 | 株式会社日立製作所 | 極低温液化冷凍装置 |
-
1981
- 1981-11-06 JP JP17719681A patent/JPS5880470A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63136494U (US20100056889A1-20100304-C00004.png) * | 1987-02-27 | 1988-09-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5880470A (ja) | 1983-05-14 |
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