JPS6148772B2 - - Google Patents

Info

Publication number
JPS6148772B2
JPS6148772B2 JP8478880A JP8478880A JPS6148772B2 JP S6148772 B2 JPS6148772 B2 JP S6148772B2 JP 8478880 A JP8478880 A JP 8478880A JP 8478880 A JP8478880 A JP 8478880A JP S6148772 B2 JPS6148772 B2 JP S6148772B2
Authority
JP
Japan
Prior art keywords
electron beam
time
irradiated
exposure
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8478880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5710233A (en
Inventor
Teruaki Okino
Nobuo Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP8478880A priority Critical patent/JPS5710233A/ja
Publication of JPS5710233A publication Critical patent/JPS5710233A/ja
Publication of JPS6148772B2 publication Critical patent/JPS6148772B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP8478880A 1980-06-23 1980-06-23 Electron beam exposing method Granted JPS5710233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8478880A JPS5710233A (en) 1980-06-23 1980-06-23 Electron beam exposing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8478880A JPS5710233A (en) 1980-06-23 1980-06-23 Electron beam exposing method

Publications (2)

Publication Number Publication Date
JPS5710233A JPS5710233A (en) 1982-01-19
JPS6148772B2 true JPS6148772B2 (ko) 1986-10-25

Family

ID=13840429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8478880A Granted JPS5710233A (en) 1980-06-23 1980-06-23 Electron beam exposing method

Country Status (1)

Country Link
JP (1) JPS5710233A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336677U (ko) * 1989-08-17 1991-04-10

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196941A (ja) * 1984-02-29 1985-10-05 Fujitsu Ltd 電子線露光方法
JPS6114720A (ja) * 1984-06-29 1986-01-22 Fujitsu Ltd 電子ビ−ム露光方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336677U (ko) * 1989-08-17 1991-04-10

Also Published As

Publication number Publication date
JPS5710233A (en) 1982-01-19

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