Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAIfiledCriticalCHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP11323279ApriorityCriticalpatent/JPS5637651A/ja
Priority to US06/183,813prioritypatent/US4371423A/en
Publication of JPS5637651ApublicationCriticalpatent/JPS5637651A/ja
Publication of JPS6148260B2publicationCriticalpatent/JPS6148260B2/ja
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
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Engineering & Computer Science
(AREA)
Manufacturing & Machinery
(AREA)
Physics & Mathematics
(AREA)
Inorganic Chemistry
(AREA)
Condensed Matter Physics & Semiconductors
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General Physics & Mathematics
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Chemical & Material Sciences
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Computer Hardware Design
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Microelectronics & Electronic Packaging
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Power Engineering
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Weting
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Electrodes Of Semiconductors
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Bipolar Transistors
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Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
JP11323279A1979-09-041979-09-04Manufacturing of semiconductor device
GrantedJPS5637651A
(en)