Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP17001079ApriorityCriticalpatent/JPS5693315A/ja
Publication of JPS5693315ApublicationCriticalpatent/JPS5693315A/ja
Publication of JPS6145392B2publicationCriticalpatent/JPS6145392B2/ja
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
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Engineering & Computer Science
(AREA)
Manufacturing & Machinery
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Physics & Mathematics
(AREA)
Inorganic Chemistry
(AREA)
Condensed Matter Physics & Semiconductors
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General Physics & Mathematics
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Chemical & Material Sciences
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Computer Hardware Design
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Microelectronics & Electronic Packaging
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Power Engineering
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Electrodes Of Semiconductors
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Bipolar Transistors
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Element Separation
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JP17001079A1979-12-261979-12-26Manufacture of semiconductor device
GrantedJPS5693315A
(en)