JPS6148255B2 - - Google Patents

Info

Publication number
JPS6148255B2
JPS6148255B2 JP52005504A JP550477A JPS6148255B2 JP S6148255 B2 JPS6148255 B2 JP S6148255B2 JP 52005504 A JP52005504 A JP 52005504A JP 550477 A JP550477 A JP 550477A JP S6148255 B2 JPS6148255 B2 JP S6148255B2
Authority
JP
Japan
Prior art keywords
light
mask
photosensitive
wafer
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52005504A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5390873A (en
Inventor
Akyoshi Suzuki
Hideki Yoshinari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP550477A priority Critical patent/JPS5390873A/ja
Publication of JPS5390873A publication Critical patent/JPS5390873A/ja
Publication of JPS6148255B2 publication Critical patent/JPS6148255B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP550477A 1977-01-21 1977-01-21 Printing device Granted JPS5390873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP550477A JPS5390873A (en) 1977-01-21 1977-01-21 Printing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP550477A JPS5390873A (en) 1977-01-21 1977-01-21 Printing device

Publications (2)

Publication Number Publication Date
JPS5390873A JPS5390873A (en) 1978-08-10
JPS6148255B2 true JPS6148255B2 (enExample) 1986-10-23

Family

ID=11613026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP550477A Granted JPS5390873A (en) 1977-01-21 1977-01-21 Printing device

Country Status (1)

Country Link
JP (1) JPS5390873A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188342U (enExample) * 1981-05-25 1982-11-30
EP0444937B1 (en) * 1990-03-02 1998-01-14 Canon Kabushiki Kaisha Exposure apparatus

Also Published As

Publication number Publication date
JPS5390873A (en) 1978-08-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term