JPS6147009B2 - - Google Patents
Info
- Publication number
- JPS6147009B2 JPS6147009B2 JP17524280A JP17524280A JPS6147009B2 JP S6147009 B2 JPS6147009 B2 JP S6147009B2 JP 17524280 A JP17524280 A JP 17524280A JP 17524280 A JP17524280 A JP 17524280A JP S6147009 B2 JPS6147009 B2 JP S6147009B2
- Authority
- JP
- Japan
- Prior art keywords
- surface wave
- electrode
- transducer
- reflector
- electrode part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 13
- 230000000737 periodic effect Effects 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- 230000005855 radiation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17524280A JPS5799813A (en) | 1980-12-13 | 1980-12-13 | Surface acoustic wave resonator |
| GB8116284A GB2078042B (en) | 1980-06-13 | 1981-05-28 | Surface acoustic wave resonator |
| US06/267,680 US4387355A (en) | 1980-06-13 | 1981-05-28 | Surface acoustic wave resonator |
| FR8111388A FR2484735A1 (fr) | 1980-06-13 | 1981-06-10 | Resonateur a ondes acoustiques de surface |
| NLAANVRAGE8102818,A NL187091C (nl) | 1980-06-13 | 1981-06-11 | Akoestische oppervlaktegolfresonator. |
| DE19813123410 DE3123410A1 (de) | 1980-06-13 | 1981-06-12 | Akustischer oberflaechenwellen-resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17524280A JPS5799813A (en) | 1980-12-13 | 1980-12-13 | Surface acoustic wave resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5799813A JPS5799813A (en) | 1982-06-21 |
| JPS6147009B2 true JPS6147009B2 (enExample) | 1986-10-17 |
Family
ID=15992740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17524280A Granted JPS5799813A (en) | 1980-06-13 | 1980-12-13 | Surface acoustic wave resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5799813A (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61251223A (ja) * | 1985-04-27 | 1986-11-08 | Pioneer Electronic Corp | 弾性表面波共振子 |
| JPH06338756A (ja) * | 1993-05-27 | 1994-12-06 | Fujitsu Ltd | 共振子型弾性表面波フィルタ |
| US7750533B2 (en) | 2005-06-21 | 2010-07-06 | Epson Toyocom Corporation | Surface acoustic wave (SAW) device, module and oscillator for improving a Q factor |
| JP4645923B2 (ja) | 2009-02-27 | 2011-03-09 | セイコーエプソン株式会社 | 弾性表面波共振子、および弾性表面波発振器 |
| EP2403141B1 (en) | 2009-02-27 | 2018-10-24 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device |
| JP5678486B2 (ja) | 2010-06-17 | 2015-03-04 | セイコーエプソン株式会社 | 弾性表面波共振子、弾性表面波発振器および電子機器 |
| JP5934464B2 (ja) | 2010-08-26 | 2016-06-15 | セイコーエプソン株式会社 | 弾性表面波共振子、および弾性表面波発振器、ならびに電子機器 |
| JP2012049818A (ja) | 2010-08-26 | 2012-03-08 | Seiko Epson Corp | 弾性表面波共振子、弾性表面波発振器、電子機器 |
| JP2012049817A (ja) | 2010-08-26 | 2012-03-08 | Seiko Epson Corp | 弾性表面波デバイス、および弾性表面波発振器、ならびに電子機器 |
| JP2012060420A (ja) | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | 弾性表面波デバイス、電子機器及びセンサー装置 |
| JP2012060422A (ja) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | 弾性表面波デバイス、電子機器及びセンサー装置 |
| JP2012060418A (ja) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | 弾性表面波デバイス、電子機器及びセンサー装置 |
| JP5652606B2 (ja) | 2010-12-03 | 2015-01-14 | セイコーエプソン株式会社 | 弾性表面波共振子、弾性表面波発振器、及び電子機器 |
| JP5648908B2 (ja) | 2010-12-07 | 2015-01-07 | セイコーエプソン株式会社 | 振動デバイス、並びに発振器、および電子機器 |
| JP2015029358A (ja) * | 2014-10-29 | 2015-02-12 | セイコーエプソン株式会社 | 弾性表面波共振子、弾性表面波発振器および電子機器 |
-
1980
- 1980-12-13 JP JP17524280A patent/JPS5799813A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5799813A (en) | 1982-06-21 |
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