JPS6145360Y2 - - Google Patents

Info

Publication number
JPS6145360Y2
JPS6145360Y2 JP3414581U JP3414581U JPS6145360Y2 JP S6145360 Y2 JPS6145360 Y2 JP S6145360Y2 JP 3414581 U JP3414581 U JP 3414581U JP 3414581 U JP3414581 U JP 3414581U JP S6145360 Y2 JPS6145360 Y2 JP S6145360Y2
Authority
JP
Japan
Prior art keywords
spool
opening
valve
diffusion pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3414581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57148099U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3414581U priority Critical patent/JPS6145360Y2/ja
Publication of JPS57148099U publication Critical patent/JPS57148099U/ja
Application granted granted Critical
Publication of JPS6145360Y2 publication Critical patent/JPS6145360Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP3414581U 1981-03-13 1981-03-13 Expired JPS6145360Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414581U JPS6145360Y2 (enrdf_load_stackoverflow) 1981-03-13 1981-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414581U JPS6145360Y2 (enrdf_load_stackoverflow) 1981-03-13 1981-03-13

Publications (2)

Publication Number Publication Date
JPS57148099U JPS57148099U (enrdf_load_stackoverflow) 1982-09-17
JPS6145360Y2 true JPS6145360Y2 (enrdf_load_stackoverflow) 1986-12-19

Family

ID=29831479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414581U Expired JPS6145360Y2 (enrdf_load_stackoverflow) 1981-03-13 1981-03-13

Country Status (1)

Country Link
JP (1) JPS6145360Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57148099U (enrdf_load_stackoverflow) 1982-09-17

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