JPS6145360Y2 - - Google Patents
Info
- Publication number
- JPS6145360Y2 JPS6145360Y2 JP3414581U JP3414581U JPS6145360Y2 JP S6145360 Y2 JPS6145360 Y2 JP S6145360Y2 JP 3414581 U JP3414581 U JP 3414581U JP 3414581 U JP3414581 U JP 3414581U JP S6145360 Y2 JPS6145360 Y2 JP S6145360Y2
- Authority
- JP
- Japan
- Prior art keywords
- spool
- opening
- valve
- diffusion pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 33
- 230000007246 mechanism Effects 0.000 claims description 14
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 9
- 238000009423 ventilation Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414581U JPS6145360Y2 (cs) | 1981-03-13 | 1981-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414581U JPS6145360Y2 (cs) | 1981-03-13 | 1981-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57148099U JPS57148099U (cs) | 1982-09-17 |
| JPS6145360Y2 true JPS6145360Y2 (cs) | 1986-12-19 |
Family
ID=29831479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3414581U Expired JPS6145360Y2 (cs) | 1981-03-13 | 1981-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6145360Y2 (cs) |
-
1981
- 1981-03-13 JP JP3414581U patent/JPS6145360Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57148099U (cs) | 1982-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3745427B2 (ja) | 真空圧制御用スロー排気バルブ | |
| JPH0842715A (ja) | 無しゅう動真空ゲートバルブ | |
| JP3138645B2 (ja) | 無摺動真空ゲートバルブ及び弁板 | |
| KR0170018B1 (ko) | 탱크실을 가진 블록밸브 | |
| JPS649510B2 (cs) | ||
| JPH1151239A (ja) | 手動機構付エアオペレイト弁 | |
| JPS6145360Y2 (cs) | ||
| JPH01261573A (ja) | 真空仕切弁 | |
| JP2000074258A (ja) | 真空ゲ―ト弁 | |
| JP2001012649A (ja) | スロー排気バルブ | |
| JP4657531B2 (ja) | 空気圧作動式開閉弁 | |
| JPH11315939A (ja) | ゲート式真空遮断弁 | |
| JPH11218238A (ja) | ゲートバルブ | |
| JPS601491Y2 (ja) | 真空弁装置 | |
| JP2000028014A (ja) | ゲート式真空遮断弁 | |
| JP3957962B2 (ja) | 多方向切換弁 | |
| JP3375444B2 (ja) | 真空バルブ | |
| JP2003106475A (ja) | 真空ゲート弁 | |
| JPH0341103Y2 (cs) | ||
| JPS6118286Y2 (cs) | ||
| JP2654494B2 (ja) | ポンプ用の往復動切換装置 | |
| JPH05288285A (ja) | マルチステップバルブアクチェータ | |
| JP2004324793A (ja) | 小流量排気弁付開閉弁 | |
| JP3790302B2 (ja) | 切換弁 | |
| JPH0518463A (ja) | パワーシフタ |