JPS6144926U - モニタ用水晶振動子 - Google Patents

モニタ用水晶振動子

Info

Publication number
JPS6144926U
JPS6144926U JP13005284U JP13005284U JPS6144926U JP S6144926 U JPS6144926 U JP S6144926U JP 13005284 U JP13005284 U JP 13005284U JP 13005284 U JP13005284 U JP 13005284U JP S6144926 U JPS6144926 U JP S6144926U
Authority
JP
Japan
Prior art keywords
crystal oscillator
particles
monitor
mass
plate surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13005284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342036Y2 (https=
Inventor
亜紀雄 千葉
幹雄 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP13005284U priority Critical patent/JPS6144926U/ja
Publication of JPS6144926U publication Critical patent/JPS6144926U/ja
Application granted granted Critical
Publication of JPH0342036Y2 publication Critical patent/JPH0342036Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
JP13005284U 1984-08-28 1984-08-28 モニタ用水晶振動子 Granted JPS6144926U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Publications (2)

Publication Number Publication Date
JPS6144926U true JPS6144926U (ja) 1986-03-25
JPH0342036Y2 JPH0342036Y2 (https=) 1991-09-03

Family

ID=30688661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13005284U Granted JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Country Status (1)

Country Link
JP (1) JPS6144926U (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012142733A (ja) * 2010-12-28 2012-07-26 Nippon Dempa Kogyo Co Ltd 圧電振動子、膜厚センサ、エッチング量センサ及び膜厚検出方法並びにエッチング量検出方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488790A (en) * 1977-12-26 1979-07-14 Seiko Instr & Electronics Ltd Resonant frequency adjusting method for crystal oscillator
JPS58117714A (ja) * 1982-01-06 1983-07-13 Hitachi Ltd 水晶板ヘツドの構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488790A (en) * 1977-12-26 1979-07-14 Seiko Instr & Electronics Ltd Resonant frequency adjusting method for crystal oscillator
JPS58117714A (ja) * 1982-01-06 1983-07-13 Hitachi Ltd 水晶板ヘツドの構造

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012142733A (ja) * 2010-12-28 2012-07-26 Nippon Dempa Kogyo Co Ltd 圧電振動子、膜厚センサ、エッチング量センサ及び膜厚検出方法並びにエッチング量検出方法

Also Published As

Publication number Publication date
JPH0342036Y2 (https=) 1991-09-03

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