JPS6143660B2 - - Google Patents
Info
- Publication number
- JPS6143660B2 JPS6143660B2 JP59137118A JP13711884A JPS6143660B2 JP S6143660 B2 JPS6143660 B2 JP S6143660B2 JP 59137118 A JP59137118 A JP 59137118A JP 13711884 A JP13711884 A JP 13711884A JP S6143660 B2 JPS6143660 B2 JP S6143660B2
- Authority
- JP
- Japan
- Prior art keywords
- concentration
- chelating agent
- copper
- potential
- plating solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002738 chelating agent Substances 0.000 claims description 36
- 238000007747 plating Methods 0.000 claims description 33
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 29
- 229910001431 copper ion Inorganic materials 0.000 claims description 29
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- 239000010949 copper Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 239000013522 chelant Substances 0.000 claims description 4
- -1 iron ions Chemical class 0.000 claims description 4
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 238000000691 measurement method Methods 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 18
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000004448 titration Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- ZGTMUACCHSMWAC-UHFFFAOYSA-L EDTA disodium salt (anhydrous) Chemical compound [Na+].[Na+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O ZGTMUACCHSMWAC-UHFFFAOYSA-L 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- 150000001242 acetic acid derivatives Chemical class 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KCQUJORJVXQRST-UHFFFAOYSA-N acetic acid;ethane-1,2-diamine Chemical compound CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O.CC(O)=O.NCCN KCQUJORJVXQRST-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
- G01N31/162—Determining the equivalent point by means of a discontinuity
- G01N31/164—Determining the equivalent point by means of a discontinuity by electrical or electrochemical means
Landscapes
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59137118A JPS60104248A (ja) | 1984-07-04 | 1984-07-04 | 化学銅めつき液中のキレ−ト剤濃度測定法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59137118A JPS60104248A (ja) | 1984-07-04 | 1984-07-04 | 化学銅めつき液中のキレ−ト剤濃度測定法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6333777A Division JPS53149389A (en) | 1977-06-01 | 1977-06-01 | Measurement method of copper ions and chelating agent concentration in chemical copper plating solution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60104248A JPS60104248A (ja) | 1985-06-08 |
| JPS6143660B2 true JPS6143660B2 (zh) | 1986-09-29 |
Family
ID=15191243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59137118A Granted JPS60104248A (ja) | 1984-07-04 | 1984-07-04 | 化学銅めつき液中のキレ−ト剤濃度測定法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60104248A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10960708B2 (en) * | 2017-04-07 | 2021-03-30 | Kumho Tire Co., Inc. | Semi-pneumatic tire and semi-pneumatic tire manufacturing method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6890758B2 (en) * | 2003-06-13 | 2005-05-10 | Eci Technology, Inc. | Measurement of complexing agent concentration in an electroless plating bath |
| US8118988B2 (en) * | 2008-01-31 | 2012-02-21 | Eci Technology, Inc. | Analysis of copper ion and complexing agent in copper plating baths |
| JP6644552B2 (ja) * | 2016-01-07 | 2020-02-12 | 株式会社ニイタカ | キレート剤の定量方法 |
| CN107202831A (zh) * | 2017-06-05 | 2017-09-26 | 深圳市华星光电技术有限公司 | 一种铜酸刻蚀液中铜离子浓度的测定方法 |
-
1984
- 1984-07-04 JP JP59137118A patent/JPS60104248A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10960708B2 (en) * | 2017-04-07 | 2021-03-30 | Kumho Tire Co., Inc. | Semi-pneumatic tire and semi-pneumatic tire manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60104248A (ja) | 1985-06-08 |
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